期刊文献+
共找到2篇文章
< 1 >
每页显示 20 50 100
H_∞ SYNCHRONIZATION CONTROL OF LINEAR SYSTEMS AND ITS APPLICATION TO WAFER-RETICAL STAGE 被引量:5
1
作者 zhoudi 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2005年第2期174-178,共5页
For the outputs of two nth-order linear control systems to work insynchronization and meanwhile to track their commands, a H_(infinity) synchronization control schemeis presented. In terms of two uncoupled single vari... For the outputs of two nth-order linear control systems to work insynchronization and meanwhile to track their commands, a H_(infinity) synchronization control schemeis presented. In terms of two uncoupled single variable linear systems, a multivariable coupledsystem is established by choosing one output and the difference of the two outputs as a new outputvector, so that both command tracking and synchronization properties can be demonstrated by aH_(infinity) performance index. To improve the synchronization and trailing performance and toguarantee the system robust stability, the mixed sensitivity H_(infinity), design methodology isadopted. The presented synchronization scheme is then extended to the case where one of the twosystems include two input variables, and then applied to the position synchronization control of awafer-retical stage. The wafer-reticle stage consists of a wafer stage, a reticle coarse stage, anda reticle fine stage. The reticle coarse stage picks up the reticle fine stage. The three stagesought to tack their commands, but synchronization between the wafer stage and the reticle fine stagemust be stressed in the tracking process. In the application, by appropriately determining theweighting matrices for the sensitivity function and the complementary sensitivity function, asatisfactory KL synchronization controller is obtained to realize highly accurate positionsynchronization, and to guarantee tracking performance. The above results are verified by simulationexperiments. 展开更多
关键词 H_(infinity) control Mixed sensitivity Synchronization control Wafer-reticle stage
在线阅读 下载PDF
Deep crustal structure of Baiyun Sag, northern South China Sea revealed from deep seismic reflection profile 被引量:53
2
作者 HUANGChunju zhoudi +2 位作者 SUNZhen CHENChangmin HAOHujun 《Chinese Science Bulletin》 SCIE EI CAS 2005年第11期1131-1138,共8页
This paper discusses deep crustal architecture of the Baiyun Sag of the Pearl River Mouth Basin, northern South China Sea based on velocity analysis, time-depth con- version and seismic interpretation of the deep seis... This paper discusses deep crustal architecture of the Baiyun Sag of the Pearl River Mouth Basin, northern South China Sea based on velocity analysis, time-depth con- version and seismic interpretation of the deep seismic reflec- tion profile DSRP-2002. The profile was acquired and proc- essed to 14 S TWT by the China National Offshore Oil Corp. (CNOOC) in 2002. It extends across the Baiyun Sag of the Pearl River Mouth Basin, from the northern continental shelf of the SCS to the deepwater province. As the first deep seismic reflection profile in the Pearl River Mouth Basin,this profile reveals seismic phases from basement down to upper most mantle. The Moho surface appears in the profile as an undulating layer of varying thickness of 1-3 km. It is not a single reflector interface, but a velocity gradient or intercon- version layer. The crust thins stepwisely from the shelf to the continental slope and the abyssal plain (from north to south), and also thins under depocenters. The crustal thickness is only 7 km in the depocenter of the main Baiyun Sag, which corresponds to a Moho upwelling mirroring the basement topography. In the lower slope and the ocean-continental transition zone of the southernmost portion of the profile, three sub-parallel, NW-dipping strong reflectors found at depths around 10-21 km are interpreted as indications of a subducted Mesozoic oceanic crust. Crustal faults exist in the northern and southern boundaries of the Baiyun Sag. The intense and persistent subsidence of the Baiyun Sag might be related to the long-term activity of the crustal faults. 展开更多
关键词 地壳结构 地表下陷 海洋 地震
在线阅读 下载PDF
上一页 1 下一页 到第
使用帮助 返回顶部