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Optical properties of Sr_(x)Ba_(1−x)Nb_(2)O_(6)nanoscale films(x=0.5 and 0.61)grown by RF-cathode sputtering in an oxygen atmosphere
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作者 S.V.Kara-Murza K.M.Zhidel +3 位作者 N.V.Korchikova yu.v.tekhtelev A.V.Pavlenko L.I.Kiseleva 《Journal of Advanced Dielectrics》 CAS 2021年第5期48-53,共6页
The research findings of the phase composition,nanostructure and optical properties of strontium-barium niobate thin films are discussed.Sr_(x)Ba_(1−x)Nb_(2)O_(6)nanosized films(x=0.5 and 0.61)were characterized by XR... The research findings of the phase composition,nanostructure and optical properties of strontium-barium niobate thin films are discussed.Sr_(x)Ba_(1−x)Nb_(2)O_(6)nanosized films(x=0.5 and 0.61)were characterized by XRD,SEM and AFM studies.Reflective multi-angle ellipsometry and spectrophotometry were used to determine the optical parameters(refractive index,its dispersion,and thickness of the damaged surface layer)of thin films.It was shown that SBN-50 and SBN-61 thin films were grown c-oriented on Al_(2)O_(3)(0001)and heteroepitaxial on MgO(001)substrates.The increase of refractive index,approaching its maximum value in the bulk material for a given composition as the film thickness increases,is observed. 展开更多
关键词 ELLIPSOMETRY optical parameters strontium-barium niobates thin films
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