In photolithography,shortening the exposure wavelength from ultraviolet to extreme ultraviolet(EUV,13.5 nm)and soft X-ray region in terms of beyond EUV(BEUV,6.X nm)and water window X-ray(WWX,2.2–4.4 nm)is expected to...In photolithography,shortening the exposure wavelength from ultraviolet to extreme ultraviolet(EUV,13.5 nm)and soft X-ray region in terms of beyond EUV(BEUV,6.X nm)and water window X-ray(WWX,2.2–4.4 nm)is expected to further miniaturize the technology node down to sub-5 nm level.However,the absorption ability of molecules in these ranges,especially WWX region,is unknown,which should be very important for the utilization of energy.Herein,the molar absorption cross sections of different elements at 2.4 nm of WWX were firstly calculated and compared with the wavelengths of 13.5 nm and 6.7 nm.Based on the absorption cross sections in these ranges and density estimation results from the density-functional theory calculation,the linear absorption coefficients of typical resist materials,including metal-oxy clusters,organic small molecules,polymers,and photoacid generators(PAGs),are evaluated.The analysis suggests that the Zn cluster has higher absorption in BEUV,whereas the Sn cluster has higher absorption in WWX.Doping PAGs with high EUV absorption atoms improves chemically amplified photoresist(CAR)polymer absorption performance.However,for WWX,it is necessary to introduce an absorption layer containing high WWX absorption elements such as Zr,Sn,and Hf to increase the WWX absorption.展开更多
In this review,instead of summarizing all the advances and progress achieved in stratospheric research,the main advances and new developments in stratosphere-troposphere coupling and stratospheric chemistry-climate in...In this review,instead of summarizing all the advances and progress achieved in stratospheric research,the main advances and new developments in stratosphere-troposphere coupling and stratospheric chemistry-climate interactions are summarized,and some outstanding issues and grand challenges are discussed.A consensus has been reached that the stratospheric state is an important source of improving the predictability of the troposphere on sub-seasonal to seasonal(S2S)time scales and beyond.However,applying stratospheric signals in operational S2S forecast models remains a challenge because of model deficiencies and the complexities of the underlying mechanisms of stratosphere-troposphere coupling.Stratospheric chemistry,which controls the magnitude and distribution of many important climate-forcing agents,plays a critical role in global climate change.Convincing evidence has been found that stratospheric ozone depletion and recovery have caused significant tropospheric climate changes,and more recent studies have revealed that stratospheric ozone variations can even exert an impact on SSTs and sea ice.The climatic impacts of stratospheric aerosols and water vapor are also important.Although their quantitative contributions to radiative forcing have been reasonably well quantified,there still exist large uncertainties in their long-term impacts on climate.The advances and new levels of understanding presented in this review suggest that whole-atmosphere interactions need to be considered in future for a better and more thorough understanding of stratosphere-troposphere coupling and its role in climate change.展开更多
This study examines the dependence of Arctic stratospheric polar vortex(SPV)variations on the meridional positions of the sea surface temperature(SST)anomalies associated with the first leading mode of North Pacific S...This study examines the dependence of Arctic stratospheric polar vortex(SPV)variations on the meridional positions of the sea surface temperature(SST)anomalies associated with the first leading mode of North Pacific SST.The principal component 1(PC1)of the first leading mode is obtained by empirical orthogonal function decomposition.Reanalysis data,numerical experiments,and CMIP5 model outputs all suggest that the PC1 events(positive-minus-negative PC1 events),located relatively northward(i.e.,North PC1 events),more easily weaken the Arctic SPV compared to the PC1 events located relatively southward(i.e.,South PC1 events).The analysis indicates that the North PC1-related Aleutian low anomaly is located over the northern North Pacific and thus enhances the climatological trough,which strengthens the planetary-scale wave 1 at mid-to-high latitudes and thereby weakens the SPV.The weakened stratospheric circulation further extends into the troposphere and favors negative surface temperature anomalies over Eurasia.By contrast,the South PC1-related Aleutian low anomaly is located relatively southward,and its constructive interference with the climatological trough is less efficient at high latitudes.Thus,the South PC1 events could not induce an evident enhancement of the planetary-scale waves at high latitudes and thereby a weakening of the SPV on average.The Eurasian cooling associated with South PC1 events(positive-minus-negative PC1 events)is also not prominent.The results of this study suggest that the meridional positions of the PC1 events may be useful for predicting the Arctic SPV and Eurasian surface temperature variations.展开更多
Metal oxide cluster(MOC)photoresists are highly promising materials for the next generation of extreme ultraviolet lithography(EUVL).The consecutive exploration of novel MOC materials and their structural irradiation ...Metal oxide cluster(MOC)photoresists are highly promising materials for the next generation of extreme ultraviolet lithography(EUVL).The consecutive exploration of novel MOC materials and their structural irradiation chemistry are the major concerns associated with EUVL.Herein,we report two bicoordinated tin-oxo clusters(TOCs),the organic ligands of which contain both adamantane carboxylic acids and alkyl groups(methyl:Sn_(4)–Me–C10;butyl:Sn_(4)–Bu–C10).We explore the correlation between the structures of the TOCs and their patterning properties by adjusting the alkyl groups coordinated to the Sn atom.The structural variation causes different irradiation chemistry,with Sn_(4)–Me–C10 exhibiting improved resolution and Sn_(4)–Bu–C10 demonstrating higher sensitivity.These differences are attributed to the bonding energies of the Sn-methyl and Sn-butyl groups,the size of the resulting alkyl radicals,and their reaction probabilities.Both clusters occur in the reactions of Sn–C bond cleavage and the decarboxylation of adamantane carboxylic acids upon irradiation.However,the entire process exhibits distinct characteristics.Based on the electron-beam lithography and other experiments,we proposed irradiationinduced reaction mechanisms for both clusters.The Sn_(4)–Bu–C10 cluster predominantly undergoes alkane chain linkage,whereas the Sn_(4)–Me–C10 cluster mainly follows the adamantanes linkage pathway.展开更多
基金supported by the National Natural Science Foundation of China(22090011,22378052)the Fundamental Research Funds for China Central Universities(DUT22LAB608 and DUT20RC(3)030)+1 种基金Liaoning Binhai Laboratory(LBLB-2023-03)Key R&D Program of Shandong Province(2021CXGC010308).
文摘In photolithography,shortening the exposure wavelength from ultraviolet to extreme ultraviolet(EUV,13.5 nm)and soft X-ray region in terms of beyond EUV(BEUV,6.X nm)and water window X-ray(WWX,2.2–4.4 nm)is expected to further miniaturize the technology node down to sub-5 nm level.However,the absorption ability of molecules in these ranges,especially WWX region,is unknown,which should be very important for the utilization of energy.Herein,the molar absorption cross sections of different elements at 2.4 nm of WWX were firstly calculated and compared with the wavelengths of 13.5 nm and 6.7 nm.Based on the absorption cross sections in these ranges and density estimation results from the density-functional theory calculation,the linear absorption coefficients of typical resist materials,including metal-oxy clusters,organic small molecules,polymers,and photoacid generators(PAGs),are evaluated.The analysis suggests that the Zn cluster has higher absorption in BEUV,whereas the Sn cluster has higher absorption in WWX.Doping PAGs with high EUV absorption atoms improves chemically amplified photoresist(CAR)polymer absorption performance.However,for WWX,it is necessary to introduce an absorption layer containing high WWX absorption elements such as Zr,Sn,and Hf to increase the WWX absorption.
基金supported by the National Natural Science Foundation of China(Grant Nos.42175089,42121004 and 42142038).
文摘In this review,instead of summarizing all the advances and progress achieved in stratospheric research,the main advances and new developments in stratosphere-troposphere coupling and stratospheric chemistry-climate interactions are summarized,and some outstanding issues and grand challenges are discussed.A consensus has been reached that the stratospheric state is an important source of improving the predictability of the troposphere on sub-seasonal to seasonal(S2S)time scales and beyond.However,applying stratospheric signals in operational S2S forecast models remains a challenge because of model deficiencies and the complexities of the underlying mechanisms of stratosphere-troposphere coupling.Stratospheric chemistry,which controls the magnitude and distribution of many important climate-forcing agents,plays a critical role in global climate change.Convincing evidence has been found that stratospheric ozone depletion and recovery have caused significant tropospheric climate changes,and more recent studies have revealed that stratospheric ozone variations can even exert an impact on SSTs and sea ice.The climatic impacts of stratospheric aerosols and water vapor are also important.Although their quantitative contributions to radiative forcing have been reasonably well quantified,there still exist large uncertainties in their long-term impacts on climate.The advances and new levels of understanding presented in this review suggest that whole-atmosphere interactions need to be considered in future for a better and more thorough understanding of stratosphere-troposphere coupling and its role in climate change.
基金the National Natural Science Foundation of China(Grant Nos.42130601,42075060,and 41875046).
文摘This study examines the dependence of Arctic stratospheric polar vortex(SPV)variations on the meridional positions of the sea surface temperature(SST)anomalies associated with the first leading mode of North Pacific SST.The principal component 1(PC1)of the first leading mode is obtained by empirical orthogonal function decomposition.Reanalysis data,numerical experiments,and CMIP5 model outputs all suggest that the PC1 events(positive-minus-negative PC1 events),located relatively northward(i.e.,North PC1 events),more easily weaken the Arctic SPV compared to the PC1 events located relatively southward(i.e.,South PC1 events).The analysis indicates that the North PC1-related Aleutian low anomaly is located over the northern North Pacific and thus enhances the climatological trough,which strengthens the planetary-scale wave 1 at mid-to-high latitudes and thereby weakens the SPV.The weakened stratospheric circulation further extends into the troposphere and favors negative surface temperature anomalies over Eurasia.By contrast,the South PC1-related Aleutian low anomaly is located relatively southward,and its constructive interference with the climatological trough is less efficient at high latitudes.Thus,the South PC1 events could not induce an evident enhancement of the planetary-scale waves at high latitudes and thereby a weakening of the SPV on average.The Eurasian cooling associated with South PC1 events(positive-minus-negative PC1 events)is also not prominent.The results of this study suggest that the meridional positions of the PC1 events may be useful for predicting the Arctic SPV and Eurasian surface temperature variations.
基金supported by the National Natural Science Foundation of China(grant nos.22090011 and 22378052)the Fundamental Research Funds for China Central Universities(grant nos.DUT22LAB608 and DUT20RC(3)030)Key R&D Program of Shandong Province(grant no.2021CXGC010308).
文摘Metal oxide cluster(MOC)photoresists are highly promising materials for the next generation of extreme ultraviolet lithography(EUVL).The consecutive exploration of novel MOC materials and their structural irradiation chemistry are the major concerns associated with EUVL.Herein,we report two bicoordinated tin-oxo clusters(TOCs),the organic ligands of which contain both adamantane carboxylic acids and alkyl groups(methyl:Sn_(4)–Me–C10;butyl:Sn_(4)–Bu–C10).We explore the correlation between the structures of the TOCs and their patterning properties by adjusting the alkyl groups coordinated to the Sn atom.The structural variation causes different irradiation chemistry,with Sn_(4)–Me–C10 exhibiting improved resolution and Sn_(4)–Bu–C10 demonstrating higher sensitivity.These differences are attributed to the bonding energies of the Sn-methyl and Sn-butyl groups,the size of the resulting alkyl radicals,and their reaction probabilities.Both clusters occur in the reactions of Sn–C bond cleavage and the decarboxylation of adamantane carboxylic acids upon irradiation.However,the entire process exhibits distinct characteristics.Based on the electron-beam lithography and other experiments,we proposed irradiationinduced reaction mechanisms for both clusters.The Sn_(4)–Bu–C10 cluster predominantly undergoes alkane chain linkage,whereas the Sn_(4)–Me–C10 cluster mainly follows the adamantanes linkage pathway.
基金financially supported by the National Natural Science Foundation of China(21925802 and 22338005)Liaoning Binhai Laboratory(LBLB-2023-03)the Fundamental Research Funds for the Central Universities(DUT22LAB601)。
