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Experimental Characterization of ALD Grown Al<SUB>2</SUB>O<SUB>3</SUB>Film for Microelectronic Applications 被引量:1
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作者 Yuxi Wang yida chen +6 位作者 Yong Zhang Zhaoxin Zhu Tao Wu Xufeng Kou Pingping Ding Romain Corcolle Jangyong Kim 《Advances in Materials Physics and Chemistry》 2021年第1期7-19,共13页
<span style="white-space:normal;">The study of high dielectric materials has received great attention lately as a key passive component for the application of metal-insulator-metal (MIM) capacitors. In... <span style="white-space:normal;">The study of high dielectric materials has received great attention lately as a key passive component for the application of metal-insulator-metal (MIM) capacitors. In this paper, 50 nm thick Al</span><sub style="white-space:normal;">2</sub><span style="white-space:normal;">O</span><sub style="white-space:normal;">3</sub><span style="white-space:normal;"> thin films have been prepared by atomic layer deposition technique on indium tin oxide (ITO) pre-coated glass substrates and titanium nitride (TiN) coated Si substrates with typical MIM capacitor structure. Photolithography and metal lift-off technique were used for processing of the MIM capacitors. Semiconductor Analyzer with probe station was used to perform capacitance-voltage (C-V) characterization with low-medium frequency range. Current-voltage (I-V) characteristics of MIM capacitors were measured on precision source/measurement system. The performance of Al</span><sub style="white-space:normal;">2</sub><span style="white-space:normal;">O</span><sub style="white-space:normal;">3</sub><span style="white-space:normal;"> films of MIM capacitors on glass was examined in the voltage range from <span style="white-space:nowrap;"><span style="white-space:nowrap;"><span style="white-space:nowrap;"><span style="white-space:nowrap;">&#8722;</span></span></span></span>5 to 5 V with a frequency range from 10 kHz to 5 MHz. Au/Al</span><sub style="white-space:normal;">2</sub><span style="white-space:normal;">O</span><sub style="white-space:normal;">3</sub><span style="white-space:normal;">/ITO/Glass MIM capacitors demonstrate a capacitance density of 1.6 fF/μm</span><sup style="white-space:normal;">2</sup><span style="white-space:normal;">at 100 kHz, a loss tangent ~0.005 at 100 kHz and a leakage current of 1.79 × 10</span><sup style="white-space:normal;"><span style="white-space:nowrap;"><span style="white-space:nowrap;"><span style="white-space:nowrap;"><span style="white-space:nowrap;">&#8722;</span></span></span></span>8</sup><span style="white-space:normal;"> A/cm</span><sup style="white-space:normal;">2</sup><span style="white-space:normal;"> at 1 MV/cm (5 V) at room temperature. Au/Al</span><sub style="white-space:normal;">2</sub><span style="white-space:normal;">O</span><sub style="white-space:normal;">3</sub><span style="white-space:normal;">/TiN/Si MIM capacitors demonstrate a capacitance density of 1.5 fF/μm</span><sup style="white-space:normal;">2</sup><span style="white-space:normal;"> at 100 kHz, a loss tangent ~0.007 at 100 kHz and a lower leakage current of 2.93 × 10</span><sup style="white-space:normal;"><span style="white-space:nowrap;"><span style="white-space:nowrap;"><span style="white-space:nowrap;"><span style="white-space:nowrap;">&#8722;</span></span></span></span>10</sup><span style="white-space:normal;"> A/cm</span><sup style="white-space:normal;">2</sup><span style="white-space:normal;"> at 1 MV/cm (5 V) at room temperature. The obtained electrical properties could indicate a promising application of MIM Capacitors.</span> 展开更多
关键词 Dielectrics High-k Thin Film Capacitors Atomic Layer Deposition MICROFABRICATION
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Apigenin alleviates osteoporosis by orchestrating SIRT1/HIF1αsignaling in mesenchymal stem cells
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作者 Xu He Mimi chen +6 位作者 Xiongjinfu Zhang Xinyi cheng yida chen Hao Shen Huilin Yang Qin Shi Junjie Niu 《Fundamental Research》 2025年第3期1063-1072,共10页
Osteoporosis(OP)is a systemic skeletal disease characterized by reduced bone mass and a degenerative bone microarchitecture.Apigenin(API),a flavonoid derived mainly from celery,has been reported to be beneficial for t... Osteoporosis(OP)is a systemic skeletal disease characterized by reduced bone mass and a degenerative bone microarchitecture.Apigenin(API),a flavonoid derived mainly from celery,has been reported to be beneficial for the treatment of OP;however,the underlying mechanisms remain unclear.Moreover,the effects of API on bone-forming cells,including mesenchymal stem cells and osteoblasts,remain unclear.In the present study,we first determined that API treatment could promote bone formation,improve bone metabolism in ovariectomized(OVX)mice,and effectively ameliorate bone loss,as supported by micro-CT scanning and histological staining of mouse femurs.In vitro investigations have confirmed that API has a bidirectional regulatory effect on bone metabolism,promoteing osteogenic differentiation and inhibiting osteoclastogenesis.The further study displayed that the promotion of osteogenesis of bone marrow-derived mesenchymal stem cells from OVX mice mainly through regulating SIRT1 and its downstream HIF1αsignaling.In summary,API treatment may be a novel and promising therapeutic strategy for the treatment of OP. 展开更多
关键词 OSTEOPOROSIS APIGENIN SIRT1 HIF1Α Bone marrow-derived mesenchymal stem cells
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