Amorphous hydrogenated carbon(a-C:H)and Ti-incorporated a-C:H(Ti/a-C:H)films were deposited by magnetron sputtering with a mixture gas of CH4 and Ar.The effect of the Ti incorporation on the chemical composition,micro...Amorphous hydrogenated carbon(a-C:H)and Ti-incorporated a-C:H(Ti/a-C:H)films were deposited by magnetron sputtering with a mixture gas of CH4 and Ar.The effect of the Ti incorporation on the chemical composition,microstructure and properties of the as-deposited and the annealed films were investigated by various techniques.It has been shown that the bonding structure and the internal stress were sensitive to the incorporation of the Ti atoms.The results of the XPS revealed that the concentration of Ti atom on the surface of the film increased when the Ti/a-C:H film annealed at 300oC.The tribologcial properties of the(Ti/)a-C:H films changed greatly after annealed,due to the graphitization,oxidation of carbon,and so forth.It compared and discussed in detail the change of the microstructure and properties of the a-C:H and Ti/a-C:H films before and after展开更多
A transparent phase-pure anatase TiO_(2)nanofilm was prepared through magnetron sputtering method,and a subsequent annealing treatment awarded it the superhydrophilic characteristic.To make clear the mechanism of the ...A transparent phase-pure anatase TiO_(2)nanofilm was prepared through magnetron sputtering method,and a subsequent annealing treatment awarded it the superhydrophilic characteristic.To make clear the mechanism of the heat-induced superhydrophilicity,the chemical composition and surface morphology of the film were investigated in detail and compared before and after the annealing treatment mainly by field emission scanning electron microscopy(FESEM),X-ray diffraction method(XRD),Raman spectroscopy,and X-ray photoelectron spectroscope(XPS).The results suggest that the probable mechanism is in accordance with the UV-induced mechanism,where the heat-induced surface oxygen vacancies and hydroxyl radicals play important roles for achieving the superhydrophilicity.展开更多
基金National Natural Science Foundation of China(50705093,50421502)
文摘Amorphous hydrogenated carbon(a-C:H)and Ti-incorporated a-C:H(Ti/a-C:H)films were deposited by magnetron sputtering with a mixture gas of CH4 and Ar.The effect of the Ti incorporation on the chemical composition,microstructure and properties of the as-deposited and the annealed films were investigated by various techniques.It has been shown that the bonding structure and the internal stress were sensitive to the incorporation of the Ti atoms.The results of the XPS revealed that the concentration of Ti atom on the surface of the film increased when the Ti/a-C:H film annealed at 300oC.The tribologcial properties of the(Ti/)a-C:H films changed greatly after annealed,due to the graphitization,oxidation of carbon,and so forth.It compared and discussed in detail the change of the microstructure and properties of the a-C:H and Ti/a-C:H films before and after
基金National Nature Science Foundation of China(50705094)
文摘A transparent phase-pure anatase TiO_(2)nanofilm was prepared through magnetron sputtering method,and a subsequent annealing treatment awarded it the superhydrophilic characteristic.To make clear the mechanism of the heat-induced superhydrophilicity,the chemical composition and surface morphology of the film were investigated in detail and compared before and after the annealing treatment mainly by field emission scanning electron microscopy(FESEM),X-ray diffraction method(XRD),Raman spectroscopy,and X-ray photoelectron spectroscope(XPS).The results suggest that the probable mechanism is in accordance with the UV-induced mechanism,where the heat-induced surface oxygen vacancies and hydroxyl radicals play important roles for achieving the superhydrophilicity.