Ion beam irradiation was adopted for surface treatment of the micro punch manufactured by precision machining.Ar plasma was used for the ion irradiation process,which was generated by the electron cyclotron resonance(...Ion beam irradiation was adopted for surface treatment of the micro punch manufactured by precision machining.Ar plasma was used for the ion irradiation process,which was generated by the electron cyclotron resonance(ECR)equipment.The surface finish processes of micro punch were carried out at irradiation angles of 45°and 10°,respectively.The surface roughness and topography were measured to estimate the quality of surface finish.The results show that the ion irradiation is very effective to reduce the surface roughness,which can be improved more significantly at irradiation angle of 10°than at 45°.The technology of surface finish with ion beam irradiation is suitable for the surface treatment of micro die.展开更多
基金Project(2006AA04Z331)supported by the Hi-tech Research and Development Program of ChinaProject(50835002)supported by theKey Program of the National Natural Science Foundation of ChinaProject(JC-06-07)supported by the Science Foundation for Distinguished Young Scholars of Heilongjiang Province,China。
文摘Ion beam irradiation was adopted for surface treatment of the micro punch manufactured by precision machining.Ar plasma was used for the ion irradiation process,which was generated by the electron cyclotron resonance(ECR)equipment.The surface finish processes of micro punch were carried out at irradiation angles of 45°and 10°,respectively.The surface roughness and topography were measured to estimate the quality of surface finish.The results show that the ion irradiation is very effective to reduce the surface roughness,which can be improved more significantly at irradiation angle of 10°than at 45°.The technology of surface finish with ion beam irradiation is suitable for the surface treatment of micro die.
