A random method used for improving light throughput of a soft X-ray multilayer has been developed in the 18-20 nm spectral region, based on the traditional theory of periodic multilayer, and an 8% gain in integrated r...A random method used for improving light throughput of a soft X-ray multilayer has been developed in the 18-20 nm spectral region, based on the traditional theory of periodic multilayer, and an 8% gain in integrated reflectance is obtained. The ensemble calculation is presented at the same time, and the multilayer is fabricated by magnetron sputtering.展开更多
文摘A random method used for improving light throughput of a soft X-ray multilayer has been developed in the 18-20 nm spectral region, based on the traditional theory of periodic multilayer, and an 8% gain in integrated reflectance is obtained. The ensemble calculation is presented at the same time, and the multilayer is fabricated by magnetron sputtering.
