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Measurement of Moisture Inside the Hermetic Package of Semiconductor Device
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作者 xiexuqiang YUTieyan 《Semiconductor Photonics and Technology》 CAS 1996年第4期302-306,共5页
The mositure content inside the hermetic package of semiconductor device has been quantitatively measured by using in-site sensor technique and computer-aided-test system.The principle and apparatus for measurement ar... The mositure content inside the hermetic package of semiconductor device has been quantitatively measured by using in-site sensor technique and computer-aided-test system.The principle and apparatus for measurement are introduced.The results show good repeatability and consistency.This technology can be used as a standard test for controlling the moisture content within semiconductor device package. 展开更多
关键词 Dew Point SENSORS Surface Conductivity
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