A mid-infrared(mid-IR)spectroscopic sensor is developed using a chalcogenide glasses(ChGs)platform with a broad transmission band.The ridge ChGs waveguides were patterned via standard i-line photolithography and react...A mid-infrared(mid-IR)spectroscopic sensor is developed using a chalcogenide glasses(ChGs)platform with a broad transmission band.The ridge ChGs waveguides were patterned via standard i-line photolithography and reactive ion etching,following the deposition of guiding and confinement layers through RF magnetron sput-tering.The waveguides exhibit a wide transparency range fromλ=3.94-8.95μm,with minimum propagation losses value of 2.5 dB/cm atλ=7.58μm.To validate the feasibility of the suggested sensor,a spectroscopic gas sensing experiment was performed using CO_(2),resulting in an estimated limit of detection(LoD)of 1.16%v atλ=4.28μm,achieved with an external confinement factorΓof 6.5%.Additionally,liquid sensing experiment was carried out using isopropanol,obtaining a LoD of 300 ppmv atλ=7.25μm.展开更多
基金supported by the French national research agency under AQUAE ANR project(ANR ANR-21-CE04-011)project IBAIA,funding from the European Union's Horizon Europe Framework Pro-gramme under grant agreement No.101092723.
文摘A mid-infrared(mid-IR)spectroscopic sensor is developed using a chalcogenide glasses(ChGs)platform with a broad transmission band.The ridge ChGs waveguides were patterned via standard i-line photolithography and reactive ion etching,following the deposition of guiding and confinement layers through RF magnetron sput-tering.The waveguides exhibit a wide transparency range fromλ=3.94-8.95μm,with minimum propagation losses value of 2.5 dB/cm atλ=7.58μm.To validate the feasibility of the suggested sensor,a spectroscopic gas sensing experiment was performed using CO_(2),resulting in an estimated limit of detection(LoD)of 1.16%v atλ=4.28μm,achieved with an external confinement factorΓof 6.5%.Additionally,liquid sensing experiment was carried out using isopropanol,obtaining a LoD of 300 ppmv atλ=7.25μm.
