We report molecular beam epitaxial growth and electrical and ultraviolet light emitting properties of(AlN)m/(GaN)n superlattices(SLs),where m and n represent the numbers of monolayers.Clear satellite peaks observed in...We report molecular beam epitaxial growth and electrical and ultraviolet light emitting properties of(AlN)m/(GaN)n superlattices(SLs),where m and n represent the numbers of monolayers.Clear satellite peaks observed in XRD 2θ-ωscans and TEM images evidence the formation of clear periodicity and atomically sharp interfaces.For(AlN)m/(GaN)n SLs with an average Al composition of 50%,we have obtained an electron density up to 4.48×10^(19)cm^(-3)and a resistivity of 0.002Ω·cm,and a hole density of 1.83×10^(18)cm^(-3)with a resistivity of 3.722Ω·cm,both at room temperature.Furthermore,the(AlN)m/(GaN)n SLs exhibit a blue shift for their photoluminescence peaks,from 403 nm to 318 nm as GaN is reduced from n=11 to n=4 MLs,reaching the challenging UVB wavelength range.The results demonstrate that the(AlN)m/(GaN)n SLs have the potential to enhance the conductivity and avoid the usual random alloy scattering of the high-Al-composition ternary AlGaN,making them promising functional components in both UVB emitter and AlGaN channel high electron mobility transistor applications.展开更多
基金Project supported by the National Key R&D Program of China(Grant No.2022YFB3605600)the National Natural Science Foundation of China(Grant No.61974065)+3 种基金the Key R&D Project of Jiangsu Province,China(Grant Nos.BE2020004-3 and BE2021026)Postdoctoral Fellowship Program of CPSF(Grant No.GZC20231098)the Jiangsu Special ProfessorshipCollaborative Innovation Center of Solid State Lighting and Energy-saving Electronics。
文摘We report molecular beam epitaxial growth and electrical and ultraviolet light emitting properties of(AlN)m/(GaN)n superlattices(SLs),where m and n represent the numbers of monolayers.Clear satellite peaks observed in XRD 2θ-ωscans and TEM images evidence the formation of clear periodicity and atomically sharp interfaces.For(AlN)m/(GaN)n SLs with an average Al composition of 50%,we have obtained an electron density up to 4.48×10^(19)cm^(-3)and a resistivity of 0.002Ω·cm,and a hole density of 1.83×10^(18)cm^(-3)with a resistivity of 3.722Ω·cm,both at room temperature.Furthermore,the(AlN)m/(GaN)n SLs exhibit a blue shift for their photoluminescence peaks,from 403 nm to 318 nm as GaN is reduced from n=11 to n=4 MLs,reaching the challenging UVB wavelength range.The results demonstrate that the(AlN)m/(GaN)n SLs have the potential to enhance the conductivity and avoid the usual random alloy scattering of the high-Al-composition ternary AlGaN,making them promising functional components in both UVB emitter and AlGaN channel high electron mobility transistor applications.
