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Nano-meter Displacement Measurement byPhase Analysis of Fringe Patterns Obtained by Optical Methods 被引量:1
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作者 Y.Morimoto t.matui +1 位作者 M.Fujigaki Y.Yamamoto 《实验力学》 CSCD 北大核心 2006年第1期20-34,共15页
Optical methods such as Twyman-Green interferometry, moiré interferometry, holographic interferometry and speckle interferometry are useful to measure displacement and strain in the full-field of structures. Rece... Optical methods such as Twyman-Green interferometry, moiré interferometry, holographic interferometry and speckle interferometry are useful to measure displacement and strain in the full-field of structures. Recently phase analysis method of fringe patterns obtained by these optical methods becomes popular, and it provides accurate quantitative results in the full-field. In this paper, in order to measure displacement and strain, real-time or high-speed nano-meter displacement measurement methods developed by the authors are introduced. That is, (1) out-of-plane displacement analysis by Twyman-Green interferometry using integrated phase-shifting method using Fourier transform phase-shifting method, (2) simultaneous two-dimensional in-plane displacement analysis by moiré interferometry and (3) out-of-plane displacement analysis by phase-shifting digital holographic interferometry. The theories and applications are shown. 展开更多
关键词 纳米位移测量 相位分析 光学方法 全息干涉测量
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