The microlens array(MLA)has been extensively utilized in optical systems;however,fabricating high-precision MLA molds for glass molding remains a significant challenge due to the inherent hardness and brittleness of c...The microlens array(MLA)has been extensively utilized in optical systems;however,fabricating high-precision MLA molds for glass molding remains a significant challenge due to the inherent hardness and brittleness of conventional mold materials.In the present investigation,an Ir-Ni-Ta-Nb high-temperature metallic glass(ht-MG)is methodically examined as a promising alternative mold material for precision glass molding.The high-temperature properties of ht-MG—including compressive strength,hardness,oxidation resistance,thermal expansion,and adhesion resistance—are systematically evaluated,confirming its suitability for mold applications.Furthermore,utilizing the thermoplastic formability of ht-MG,MLA molds with a unit diameter of 80μm and a sagittal height of 25μm are successfully fabricated.Surface roughness measurements further confirmed the fidelity of the pattern transfer,with the ht-MG mold exhibiting only a slight increase in roughness from 4.583 to 4.735 nm,whereas the final glass MLA maintains a surface roughness of 5.689 nm.The glass MLA fabricated via the ht-MG mold exhibits an exceptional replication rate of 99.5%,ensuring fairly accurate structural reproduction.Furthermore,optical characterization confirms that the molded glass MLA possesses high-quality imaging and focusing capabilities,with well-defined focal spots and minimal aberrations.The uniformity of the microlenses and their optical performance firmly confirm the effectiveness of the ht-MG mold in achieving precise optical structures.This study effectively presents a reliable material and non-mechanical-machining strategy for fabricating high-precision MLA molds via amorphous alloy materials and provides an effective scalable approach for manufacturing high-performance optical glass components.展开更多
基金supported by the National Natural Science Foundation of China(Grant Nos.52471070,52402176)the Natural Science Foundation of Fujian Province(Grant No.2024J08075)+2 种基金the Fujian University of Technology Foundation(Grant No.GY-Z24019)the Science and Technology Innovation Commission Shenzhen(Grant Nos.RCJC20221008092730037,20220804091920001)the Research Team Cultivation Program of Shenzhen University(Grant No.2023QNT001)。
文摘The microlens array(MLA)has been extensively utilized in optical systems;however,fabricating high-precision MLA molds for glass molding remains a significant challenge due to the inherent hardness and brittleness of conventional mold materials.In the present investigation,an Ir-Ni-Ta-Nb high-temperature metallic glass(ht-MG)is methodically examined as a promising alternative mold material for precision glass molding.The high-temperature properties of ht-MG—including compressive strength,hardness,oxidation resistance,thermal expansion,and adhesion resistance—are systematically evaluated,confirming its suitability for mold applications.Furthermore,utilizing the thermoplastic formability of ht-MG,MLA molds with a unit diameter of 80μm and a sagittal height of 25μm are successfully fabricated.Surface roughness measurements further confirmed the fidelity of the pattern transfer,with the ht-MG mold exhibiting only a slight increase in roughness from 4.583 to 4.735 nm,whereas the final glass MLA maintains a surface roughness of 5.689 nm.The glass MLA fabricated via the ht-MG mold exhibits an exceptional replication rate of 99.5%,ensuring fairly accurate structural reproduction.Furthermore,optical characterization confirms that the molded glass MLA possesses high-quality imaging and focusing capabilities,with well-defined focal spots and minimal aberrations.The uniformity of the microlenses and their optical performance firmly confirm the effectiveness of the ht-MG mold in achieving precise optical structures.This study effectively presents a reliable material and non-mechanical-machining strategy for fabricating high-precision MLA molds via amorphous alloy materials and provides an effective scalable approach for manufacturing high-performance optical glass components.
