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Design and fabrication of silicon-tessellated structures for monocentric imagers 被引量:3
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作者 Tao Wu Stephen S.Hamann +3 位作者 Andrew C.Ceballos Chu-En Chang Olav Solgaard roger t.howe 《Microsystems & Nanoengineering》 EI 2016年第1期213-221,共9页
Compared with conventional planar optical image sensors,a curved focal plane array can simplify the lens design and improve the field of view.In this paper,we introduce the design and implementation of a segmented,hem... Compared with conventional planar optical image sensors,a curved focal plane array can simplify the lens design and improve the field of view.In this paper,we introduce the design and implementation of a segmented,hemispherical,CMOS-compatible silicon image plane for a 10-mm diameter spherical monocentric lens.To conform to the hemispherical focal plane of the lens,we use flexible gores that consist of arrays of spring-connected silicon hexagons.Mechanical functionality is demonstrated by assembling the 20-μm-thick silicon gores into a hemispherical test fixture.We have also fabricated and tested a photodiode array on a siliconon-insulator substrate for use with the curved imager.Optical testing shows that the fabricated photodiodes achieve good performance;the hemispherical imager enables a compact 160°field of view camera with >80% fill factor using a single spherical lens. 展开更多
关键词 curved image plane monocentric imager PHOTODIODE recessed negative trench profile
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Micron-gap spacers with ultrahigh thermal resistance and mechanical robustness for direct energy conversion Samuel 被引量:2
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作者 M.Nicaise Chen Lin +10 位作者 Mohsen Azadi Tara Bozorg-Grayeli Promise Adebayo-Ige Drew E.Lilley Yann Pfitzer Wujoon Cha Kyana Van Houten Nicholas A.Melosh roger t.howe Jared W.Schwede Igor Bargatin 《Microsystems & Nanoengineering》 EI CSCD 2019年第1期344-355,共12页
In thermionic energy converters,the absolute efficiency can be increased up to 40%if space-charge losses are eliminated by using a sub-10-μm gap between the electrodes.One practical way to achieve such small gaps ove... In thermionic energy converters,the absolute efficiency can be increased up to 40%if space-charge losses are eliminated by using a sub-10-μm gap between the electrodes.One practical way to achieve such small gaps over large device areas is to use a stiff and thermally insulating spacer between the two electrodes.We report on the design,fabrication and characterization of thin-film alumina-based spacers that provided robust 3–8μm gaps between planar substrates and had effective thermal conductivities less than those of aerogels.The spacers were fabricated on silicon molds and,after release,could be manually transferred onto any substrate.In large-scale compression testing,they sustained compressive stresses of 0.4–4 MPa without fracture.Experimentally,the thermal conductance was 10–30 mWcm^(−2)K^(−1)and,surprisingly,independent of film thickness(100–800 nm)and spacer height.To explain this independence,we developed a model that includes the pressure-dependent conductance of locally distributed asperities and sparse contact points throughout the spacer structure,indicating that only 0.1–0.5%of the spacerelectrode interface was conducting heat.Our spacers show remarkable functionality over multiple length scales,providing insulating micrometer gaps over centimeter areas using nanoscale films.These innovations can be applied to other technologies requiring high thermal resistance in small spaces,such as thermophotovoltaic converters,insulation for spacecraft and cryogenic devices. 展开更多
关键词 THERMAL RESISTANCE FILM
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