By combination of DC reactive magnetron sputter i ng with multiple arcplating,the alternating C_(3)N_(4)/TiN compo und film is deposited onto HSS.The core level binding energy and the contents o f carbon and nitrogen ...By combination of DC reactive magnetron sputter i ng with multiple arcplating,the alternating C_(3)N_(4)/TiN compo und film is deposited onto HSS.The core level binding energy and the contents o f carbon and nitrogen are characterized by X-ray photoelectron spectrum.X-ray diffraction(XRD)shows that compound thin film contains hard crystalline phases ofα-C_(3)N_(4)andβ-C_(3)N_(4).The Knoop microhardne ss in the load range of 50.5-54.1 GPa is measured.According to acoustic emissi on scratch test,the critical load values for the coatings on HSS substrates are in the range of 40-80 N.The metal coated with C_(3)N_(4)/TiN compound f ilms has a great improvement in the resistance against corrosion.Many tests sho w that such a coating has a very high wearability.Compared with the uncoated an d TiN coated tools,the C_(3)N_(4)/TiN coated tools have a much longer cut ting life.展开更多
基金Supported by the National Natural Science Foun-dation of China(19875037)
文摘By combination of DC reactive magnetron sputter i ng with multiple arcplating,the alternating C_(3)N_(4)/TiN compo und film is deposited onto HSS.The core level binding energy and the contents o f carbon and nitrogen are characterized by X-ray photoelectron spectrum.X-ray diffraction(XRD)shows that compound thin film contains hard crystalline phases ofα-C_(3)N_(4)andβ-C_(3)N_(4).The Knoop microhardne ss in the load range of 50.5-54.1 GPa is measured.According to acoustic emissi on scratch test,the critical load values for the coatings on HSS substrates are in the range of 40-80 N.The metal coated with C_(3)N_(4)/TiN compound f ilms has a great improvement in the resistance against corrosion.Many tests sho w that such a coating has a very high wearability.Compared with the uncoated an d TiN coated tools,the C_(3)N_(4)/TiN coated tools have a much longer cut ting life.
