Elemental imaging in laser-induced breakdown spectroscopy is usually performed by placing laser shots adjacent to each other on the sample surface without spatial overlap.Seeing that signal intensity is directly relat...Elemental imaging in laser-induced breakdown spectroscopy is usually performed by placing laser shots adjacent to each other on the sample surface without spatial overlap.Seeing that signal intensity is directly related to the amount of ablated material,this restricts either spatial resolution(for a given excitation efficiency)or sensitivity(when reducing the laser spot size).The experimental applicability of a concept involving the spatial overlapping of shots on the sample surface is investigated and compared to the conventional approach.By systematic choice of spacing between laser shots,spatial resolution can be improved to the single digit micrometer range for a given laser spot size.Signal intensity is found to be linearly dependent on the area ablated per shot,facilitating larger signal-to-background ratios with increased spot sizes.Owing to this,the presented approach is also employed to enhance signal intensity,while preserving spatial resolution.The applicability of the method is explored by analyzing samples with distinct thickness of the surface layer,allowing for the assessment of the concept’s suitability for different sample types.展开更多
基金supported by an Industry Collaboration funded by Infineon Technologies Austria AG in the course of the European project“IPCEI on Microelectronics”.
文摘Elemental imaging in laser-induced breakdown spectroscopy is usually performed by placing laser shots adjacent to each other on the sample surface without spatial overlap.Seeing that signal intensity is directly related to the amount of ablated material,this restricts either spatial resolution(for a given excitation efficiency)or sensitivity(when reducing the laser spot size).The experimental applicability of a concept involving the spatial overlapping of shots on the sample surface is investigated and compared to the conventional approach.By systematic choice of spacing between laser shots,spatial resolution can be improved to the single digit micrometer range for a given laser spot size.Signal intensity is found to be linearly dependent on the area ablated per shot,facilitating larger signal-to-background ratios with increased spot sizes.Owing to this,the presented approach is also employed to enhance signal intensity,while preserving spatial resolution.The applicability of the method is explored by analyzing samples with distinct thickness of the surface layer,allowing for the assessment of the concept’s suitability for different sample types.
