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EUV Lithography: State-of-the-Art Review 被引量:4
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作者 nan fu Yanxiang Liu +1 位作者 Xiaolong Ma Zanfeng Chen 《Journal of Microelectronic Manufacturing》 2019年第2期7-20,共14页
Although several years delayed than its initial plan, extreme UV lithography (EUVL) with 13.5nm wavelength has been finally implemented into high volume manufacture (HVM) of mainstream semiconductor industry since 201... Although several years delayed than its initial plan, extreme UV lithography (EUVL) with 13.5nm wavelength has been finally implemented into high volume manufacture (HVM) of mainstream semiconductor industry since 2018. With the delivery and installation of ASML EUV scanners in those giant Fab players like Samsung, TSMC and Intel, EUV lithography is becoming a sort of industry standard exposure metrology for those critical layers of advanced technology nodes beyond 7nm. Although ASML NXE EUVL scanner is the only commercialized EUV exposure system available on the market, its development is the concentration of all essence from worldwide industrial and academic collaboration. It is becoming more and more important not only for fab runners but also for main stream fabless design houses to understand and participate the progress of EUVL. In this review, working principles, module structures and technical challenges have been briefly discussed regarding each EUV subsystem, including light source, reflection mirrors and system, reticle module as well as photoresist development. EUV specific issues of light intensity, defectivity within reflection system, line edge roughness (LER) and mask 3D effects have been focused respectively and promising solutions have been summarized as well. 展开更多
关键词 EUV LITHOGRAPHY EUV REVIEW MASK 3D line edge ROUGHNESS EUV light source
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A novel cold-inducible promoter,PThCAP from Tamarix hispida,confers cold tolerance in transgenic Arabidopsis thaliana
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作者 Xiaohong Guo Yandong Lv +4 位作者 Hongyu Li nan fu Guiping Zheng Lihua Liu Yuhua Li 《Journal of Forestry Research》 SCIE CAS CSCD 2018年第2期330-336,共7页
Our previous studies have revealed that the Th CAP gene plays a vital role in transgenic Populus(P.davidiana 9 P.bolleana) in response to cold stress.However,the regulatory mechanism of Th CAP gene expression has been... Our previous studies have revealed that the Th CAP gene plays a vital role in transgenic Populus(P.davidiana 9 P.bolleana) in response to cold stress.However,the regulatory mechanism of Th CAP gene expression has been unclear.In this study,the 50 flanking region of the Th CAP promoter(PTh CAP) was cloned using a genomewalking method.By analyzing cis-acting regulatory elements of PTh CAP,a DRE motif and MYC and MYB elements were found to be located in the promoter.To identify the regulatory elements that control the expression of the Th CAP gene promoter,a series of deletion derivatives ofPTh CAP,P1–P5,from the translation start code(-1538,-1190,-900,-718 and-375 bp),were fused to the GUS reporter gene,and then each deletion was stably introduced into Arabidopsis thaliana plants.Deletion analysis of the promoter suggested that only the P2 fragment had strong GUS expression in leaves and roots of A.thaliana exposed to low temperature stress.These results suggest that this290-bp region(-1190 to-900 bp),as an important part in PTh CAP,was associated with cold tolerance of A.thaliana.Our results provide evidence for the regulatory mechanism of Th CAP gene involved in the response to cold stress,and that the gene is promising candidate gene for genetic improvement of crops. 展开更多
关键词 Arabidopsis thaliana Cis-acting elements GUS expression PThCAP ThCAP gene
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A new method of preparing NdB_(6)ultra-fine powders
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作者 Zhi-He Dou Ting-An Zhang +4 位作者 Shi-Gang Fan Qiu-Yang Huang Jin-Liang Zhang Hong-Yu Xiao nan fu 《Rare Metals》 SCIE EI CAS CSCD 2022年第7期2363-2369,共7页
Combustion synthesis method was used to prepare NdB_(6)ultra-fine powders with B_(2)O_(3),Nd_(2)O_(3)and Mg powders as the raw materials.The basic thermody-namic data of NdB_(6) were estimated.The standard forma-tion ... Combustion synthesis method was used to prepare NdB_(6)ultra-fine powders with B_(2)O_(3),Nd_(2)O_(3)and Mg powders as the raw materials.The basic thermody-namic data of NdB_(6) were estimated.The standard forma-tion heat of NdB_(6) is-357.48 kJ·mol^(-1).The values of the heat capacity and the standard entropy are 96.87 and 86.60 J·K^(-1)·mol^(-1),respectively.The adiabatic tempera-ture of the reaction is 2726 K,which is higher than the thermodynamic criterion of 1800 K.This indicates that the combustion synthesis reaction of the B_(2)O_(3)-Nd_(2)O_(3)-Mg system could spontaneously take place by itself to generate NdB_(6).The NdB_(6) powders were characterized by X-ray diffractometer(XRD),scanning electron microscopy(SEM)and differential scanning calorimetry-thermo-gravimetry(DSC-TG).The results indicate that the com-bustion products consist of NdB_(6),MgO,and a few Mg_(3)B_(2)O_(6)and Nd_(2)B_(2)O_(6).The leached products consist of single NdB_(6) phase,and its purity is 98.6 wt%.When the sample preparation pressure is 20 MPa,the average parti-cle size of NdB_(6) powders is less than 500 nm.The antioxidant ability of NdB_(6) is very strong,which is oxi-dized step by step.The apparent activation energies of the oxidation reactions are 986.14 and 313.83 kJ·mol^(-1),respectively.In addition,the reaction orders are 4.10 and 3.75,respectively. 展开更多
关键词 Hexaboride neodymium Ultra-fine powder Combustion synthesis Thermodynamics estimate
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面向云原生网络的微服务系统故障诊断方法
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作者 付楠 程光 +1 位作者 戴广晔 滕跃 《中国科学:信息科学》 北大核心 2025年第8期1888-1905,共18页
云原生数据中心网络的复杂性和动态性对多源数据驱动的故障检测及细粒度分析提出了更高要求.有效的故障检测与详细的故障关联和分析成为提升云原生网络韧性的关键.然而,现有方法缺乏对故障与多源数据特征的关联分析,难以生成与网络组件... 云原生数据中心网络的复杂性和动态性对多源数据驱动的故障检测及细粒度分析提出了更高要求.有效的故障检测与详细的故障关联和分析成为提升云原生网络韧性的关键.然而,现有方法缺乏对故障与多源数据特征的关联分析,难以生成与网络组件和实例相关的故障报告.为此,本文提出了一种面向云原生网络的微服务系统故障诊断方法,旨在通过故障检测、关联和分析来提升网络韧性.该方法分析3类故障与多源数据的相关性,结合关键指标、跨度持续时间和偏移特征来构建特征序列.通过追踪数据和网络资源接口构建动态的多层微服务架构图,并关联深度学习模型输出的故障检测结果,最终生成细粒度的故障分析报告.实验结果表明,本文方法在故障检测性能上高于其他基线方法,并为工程师提供了云原生网络相关的故障关联和分析报告,帮助提升云原生网络韧性. 展开更多
关键词 云原生 微服务 网络韧性 故障诊断 人工智能运维
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Bioengineering strategies for augmenting wound-healing efficacy of mesenchymal stem cell-derived extracellular vesicles
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作者 Xianhao Shi nan fu +3 位作者 Huan Zhang Holly M.Brown-Borg Shihua Wang Robert Chunhua Zhao 《Science Bulletin》 2025年第7期987-990,共4页
Delayed or impaired wound healing significantly reduces the overall life-quality of affected patients and causes a great burden to the healthcare system.Recently,mesenchymal stem cell(MSC)-derived extracellular vesicl... Delayed or impaired wound healing significantly reduces the overall life-quality of affected patients and causes a great burden to the healthcare system.Recently,mesenchymal stem cell(MSC)-derived extracellular vesicles(MSC-EVs)have been demonstrated to hold great promise for wound healing due to their rich cargo of bioactive substances.Through the transfer of these bioactive substances to recipient cells in the wound area,MSC-EVs can promote angiogenesis,modulate immune responses,and reduce inflammation,which are integral components of the wound healing process.The inherent therapeutic effects of MSC-EVs largely depend on their cargo,which consists of microRNAs,proteins,lipids,and other bioactive compounds.While numerous studies have extensively assessed the efficacy of MSC-EVs in preclinical animal models,only a few have advanced to clinical trials.For example,Aegle Therapeutics aimed to investigate the safety and efficacy of bone marrow MSC-EVs for patients with deep seconddegree skin burns,with wound healing potential assessed by recording the percentage of re-epithelialization and time to complete closure over an 8-week period(ClinicalTrials.gov Identifier NCT05078385).Another clinical trial(ClinicalTrials.gov Identifier NCT05243368)sought to evaluate the effects of personalized nutritional interventions combined with MSC-EVs on the regenerative capacity and wound healing of skin ulcers in diabetic patients.Although preclinical investigations of MSC-EVs in wound healing have yielded promising results,the translation to clinical settings is in its early stages.Future research should incorporate sophisticated and varied clinical trial designs to thoroughly assess thesafety and efficacy of MSC-EVs. 展开更多
关键词 wound healing reduce inflammationwhic bioactive substancesthrough extracellular vesicles msc evs bioactive substances stem cell msc derived recipient cells promote angiogenesismodulate immune responsesand
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Polycyclic aromatic hydrocarbons(PAHs)bound to indoor dust in plateau households
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作者 Jialuo Song nan fu +6 位作者 Min Wu Wei Du Zhanpeng Cui Yang Liu Danping Wu Kang Mao Bo Pan 《Building Simulation》 2025年第12期3247-3260,共14页
Polycyclic aromatic hydrocarbons(PAHs)bound to indoor dust pose a significant health threat,while limited studies focused on their difference between rural and urban households,particularly in highland regions.This st... Polycyclic aromatic hydrocarbons(PAHs)bound to indoor dust pose a significant health threat,while limited studies focused on their difference between rural and urban households,particularly in highland regions.This study systematically analyzed PAHs in indoor dust collected from rural and urban plateau households in Yunan Province,China focusing on their concentrations,particle-size distributions,sources,and carcinogenic risks.Rural households showed significantly higher PAH concentrations than urban households(7575.03 ng/g vs.5788.73 ng/g),with higher proportion of 2-ring PAHs in urban households and 3–4 ring PAHs dominating in rural samples,reflecting differences in combustion sources and building characteristics.A distinct particle-size pattern of PAHs was also observed,with higher levels in coarse fractions(F1-F3)in urban households,while fine fractions(F4–F6)were enriched in rural households.The results of source apportionment via PMF found that traffic emissions dominated the total incremental lifetime cancer risk(ILCR)in both rural and urban households(57.4%and 64.8%,respectively),followed by biomass burning and/or cooking(25.9% and 22.6%,respectively),and coal burning(16.7 and 12.6%,respectively).Moreover,the overall ILCR in rural households was significantly higher than that in urban households,and children exhibited significantly higher ILCR values than adults in both rural and urban households,with a total ILCR of 4.52×10^(-6),primarily via dermal contact and ingestion.These findings provide a scientific basis for identifying and managing indoor air pollution risks in plateau households. 展开更多
关键词 indoor dust polycyclic aromatic hydrocarbons urban-rural differences source apportionment incremental lifetime cancer risk
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Human adipose and umbilical cord mesenchymal stem cellderived extracellular vesicles mitigate photoaging via TIMP1/Notch1 被引量:5
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作者 Huan Zhang Xian Xiao +4 位作者 Liping Wang Xianhao Shi nan fu Shihua Wang Robert Chunhua Zhao 《Signal Transduction and Targeted Therapy》 SCIE CSCD 2024年第11期5319-5335,共17页
UVB radiation induces oxidative stress,DNA damage,and inflammation,leading to skin wrinkling,compromised barrier function,and an increased risk of carcinogenesis.Addressing or preventing photoaging may offer a promisi... UVB radiation induces oxidative stress,DNA damage,and inflammation,leading to skin wrinkling,compromised barrier function,and an increased risk of carcinogenesis.Addressing or preventing photoaging may offer a promising therapeutic avenue for these conditions.Recent research indicated that mesenchymal stem cells(MSCs)exhibit significant therapeutic potential for various skin diseases.Given that extracellular vesicles(EV)can deliver diverse cargo to recipient cells and elicit similar therapeutic effects,we investigated the roles and underlying mechanisms of both adipose-derived MSC-derived EV(AMSC-EV)and umbilical cord-derived MSC-derived EV(HUMSC-EV)in photoaging.Our findings indicated that in vivo,treatment with AMSC-EV and HUMSC-EV resulted in improvements in wrinkles and skin hydration while also mitigating skin inflammation and thickness alterations in both the epidermis and dermis.Additionally,in vitro studies using human keratinocytes(HaCaTs),human dermal fibroblast cells(HDFs),and T-Skin models revealed that AMSC-EV and HUMSC-EV attenuated senescence,reduced levels of reactive oxygen species(ROS)and DNA damage,and alleviated inflammation induced by UVB.Furthermore,EV treatment enhanced cell viability and migration capacity in the epidermis and promoted extracellular matrix(ECM)remodeling in the dermis in photoaged cell models.Mechanistically,proteomics results showed that TIMP1 was highly expressed in both AMSC-EV and HUMSC-EV and could exert similar effects as MSC-EV.In addition,we found that EV and TIMP1 could inhibit Notch1 and downstream targets Hes1,P16,P21,and P53.Collectively,our data suggests that both AMSC-EV and HUMSC-EV attenuate skin photoaging through TIMP1/Notch1. 展开更多
关键词 NOTCH1 INFLAMMATION alterations
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