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Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape 被引量:1
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作者 Xiangjun dai Tianyu Yuan +5 位作者 Hanyang Jiang Xinxing Shao meiling dai Hai Yun Fujun Yang Xiaoyuan He 《Chinese Optics Letters》 SCIE EI CAS CSCD 2018年第3期21-24,共4页
This Letter demonstrates a novel lateral shear interferometer system for simultaneous measurement of three-dimensional(3D)shape and thickness of transparent objects.Multi-frequency fringe patterns can be created by ti... This Letter demonstrates a novel lateral shear interferometer system for simultaneous measurement of three-dimensional(3D)shape and thickness of transparent objects.Multi-frequency fringe patterns can be created by tilting mirrors at different inclination angles.With a single camera,the multi-frequency fringes are recorded in one image.The phase-shift of the fringes can be generated synchronously only by moving a plane-parallel plate along an in-plane parallel direction.According to the feature of transparent materials,the thickness and 3D shape can be reconstructed simultaneously based on the relationship between the in-plane displacement and their characteristics.The experiment was conducted on a thin transparent film subjected to a shearing force,which verifies the feasibility of the proposed system. 展开更多
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