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CMOS optoelectronic spectrometer based on photonic integrated circuit for in vivo 3D optical coherence tomography 被引量:1
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作者 Anja Agneter Paul Muellner +17 位作者 Quang Nguyen Dana Seyringer Elisabet ARank marko vlaskovic Jochen Kraft Martin Sagmeister Stefan Nevlacsil Moritz Eggeling Alejandro Maese-Novo Yevhenii Morozov Nicole Schmitner Robin AKimmel Ernst Bodenstorfer Pietro Cipriano Horst Zimmermann Rainer ALeitgeb Rainer Hainberger Wolfgang Drexler 《PhotoniX》 2024年第1期184-204,共21页
Photonic integrated circuits(PICs)represent a promising technology for the muchneeded medical devices of today.Their primary advantage lies in their ability to integrate multiple functions onto a single chip,thereby r... Photonic integrated circuits(PICs)represent a promising technology for the muchneeded medical devices of today.Their primary advantage lies in their ability to integrate multiple functions onto a single chip,thereby reducing the complexity,size,maintenance requirements,and costs.When applied to optical coherence tomography(OCT),the leading tool for state-of-the-art ophthalmic diagnosis,PICs have the potential to increase accessibility,especially in scenarios,where size,weight,or costs are limiting factors.In this paper,we present a PIC-based CMOS-compatible spectrometer for spectral domain OCT with an unprecedented level of integration.To achieve this,we co-integrated a 512-channel arrayed waveguide grating with electronics.We successfully addressed the challenge of establishing a connection from the optical waveguides to the photodiodes monolithically co-integrated on the chip with minimal losses achieving a coupling efficiency of 70%.With this fully integrated PIC-based spectrometer interfaced to a spectral domain OCT system,we reached a sensitivity of 92dB at an imaging speed of 55kHz,with a 6dB signal roll-off occurring at 2mm.We successfully applied this innovative technology to obtain 3D in vivo tomograms of zebrafish larvae and human skin.This ground-breaking fully integrated spectrometer represents a significant step towards a miniaturised,cost-effective,and maintenance-free OCT system. 展开更多
关键词 Photonic integrated circuit Optical coherence tomography CMOS photonics OPTOELECTRONIC Integrated spectrometer Electronic-photonic integration
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