A high precision detection technique is analyzed based on the optical micro electro-mechanical system(MEMS)accelerometer with double gratings for noise suppression and scale factor enhancement.The brief sensing model ...A high precision detection technique is analyzed based on the optical micro electro-mechanical system(MEMS)accelerometer with double gratings for noise suppression and scale factor enhancement.The brief sensing model and modulation detection model are built using the phase sensitive detection,and the relationship between stimulated acceleration and system output is given.The schematics of gap modulation and light intensity modulation are analyzed respectively,and the choice of modulation frequency in the optical MEMS accelerometer system is discussed.According to the experimental results,the scale factor is improved from 15.45 V/g with the gap modulation to 18.78 V/g with the light intensity modulation,and the signal to noise ratio is improved from 42.95 dB to 81.73 dB.The overall noise level in the optical MEMS accelerometer is effectively suppressed.展开更多
Two-photon fluorescence microscopy,based on the principles of two-photon excited fluorescence and second harmonic generation,enables real-time non-invasive in vivo imaging of skin and cells,providing a means to assess...Two-photon fluorescence microscopy,based on the principles of two-photon excited fluorescence and second harmonic generation,enables real-time non-invasive in vivo imaging of skin and cells,providing a means to assess human health status.In this paper,a miniaturized two-photon imaging system is designed and fabricated to withstand extreme vibration and shock environments.The mechanical stability of the optical and structural components of the miniaturized probe is evaluated under random vibration and shock vibration tests using finite element simulation methods and ray tracing techniques.During the environmental testing,the maximum stress on the probe is 11.5 MPa,which is well below the threshold for structural failure.The largest structural displacement occurs at the collimator,where random vibrations produce an offset of 10.9μm.This offset is analyzed by using geometric optics and point spread functions.Under the maximum collimator offset,the theoretical resolution,as calculated by the point spread function,shifted from 463.28 nm to 463.48 nm.Additionally,a lateral offset of 127 nm is observed at the center position,which does not significantly impact the imaging performance.Finally,environmental and imaging performance tests are conducted.The system’s measured resolution after the environmental tests is 530 nm,consistent with its resolution prior to testing.Imaging tests are also performed on the skin’s stratum corneum,granular layer,spinous layer,and basal cell layer,revealing clear cellular structural information.These results confirm the device’s potential for applications in extreme shock and vibration environments.展开更多
基金supported by the National Natural Science Foundation of China(62205377).
文摘A high precision detection technique is analyzed based on the optical micro electro-mechanical system(MEMS)accelerometer with double gratings for noise suppression and scale factor enhancement.The brief sensing model and modulation detection model are built using the phase sensitive detection,and the relationship between stimulated acceleration and system output is given.The schematics of gap modulation and light intensity modulation are analyzed respectively,and the choice of modulation frequency in the optical MEMS accelerometer system is discussed.According to the experimental results,the scale factor is improved from 15.45 V/g with the gap modulation to 18.78 V/g with the light intensity modulation,and the signal to noise ratio is improved from 42.95 dB to 81.73 dB.The overall noise level in the optical MEMS accelerometer is effectively suppressed.
基金supported by the National Natural Science Foundation of China(62475008,62305186).
文摘Two-photon fluorescence microscopy,based on the principles of two-photon excited fluorescence and second harmonic generation,enables real-time non-invasive in vivo imaging of skin and cells,providing a means to assess human health status.In this paper,a miniaturized two-photon imaging system is designed and fabricated to withstand extreme vibration and shock environments.The mechanical stability of the optical and structural components of the miniaturized probe is evaluated under random vibration and shock vibration tests using finite element simulation methods and ray tracing techniques.During the environmental testing,the maximum stress on the probe is 11.5 MPa,which is well below the threshold for structural failure.The largest structural displacement occurs at the collimator,where random vibrations produce an offset of 10.9μm.This offset is analyzed by using geometric optics and point spread functions.Under the maximum collimator offset,the theoretical resolution,as calculated by the point spread function,shifted from 463.28 nm to 463.48 nm.Additionally,a lateral offset of 127 nm is observed at the center position,which does not significantly impact the imaging performance.Finally,environmental and imaging performance tests are conducted.The system’s measured resolution after the environmental tests is 530 nm,consistent with its resolution prior to testing.Imaging tests are also performed on the skin’s stratum corneum,granular layer,spinous layer,and basal cell layer,revealing clear cellular structural information.These results confirm the device’s potential for applications in extreme shock and vibration environments.
