Hexagonal boron nitride(h-BN)is found to have widespread application,owing to its outstanding properties,including gate dielectrics,passivation layers,and tunneling layers.The current studies on the funda⁃mental physi...Hexagonal boron nitride(h-BN)is found to have widespread application,owing to its outstanding properties,including gate dielectrics,passivation layers,and tunneling layers.The current studies on the funda⁃mental physical properties of these ultrathin h-BN films and the electron tunneling effect among them are inade⁃quate.In this work,the effective mass in h-BN was successfully determined through a combined approach of ex⁃perimental and theoretical research methods by fitting the current-voltage curves of metal/insulator/metal struc⁃tures.It was observed that within a range of 4-22 layers,the effective mass of h-BN exhibits a monotonic de⁃crease with an increase in the number of layers.The physical parameters of the Fowler-Nordheim tunneling model in the context of electron tunneling in h-BN are precisely ascertained by utilizing the extracted effective mass.Ad⁃ditionally,the impact of fixed charges at the metal/h-BN interface and various metal electrode types on FowlerNordheim tunneling within this structure is investigated utilizing this physical parameter in Sentaurus TCAD soft⁃ware.This work is informative and instructive in promoting applications in the fields of h-BN related infrared physics and technology.展开更多
基金Supported by the National Natural Science Foundation of China(62074085,62104118)。
文摘Hexagonal boron nitride(h-BN)is found to have widespread application,owing to its outstanding properties,including gate dielectrics,passivation layers,and tunneling layers.The current studies on the funda⁃mental physical properties of these ultrathin h-BN films and the electron tunneling effect among them are inade⁃quate.In this work,the effective mass in h-BN was successfully determined through a combined approach of ex⁃perimental and theoretical research methods by fitting the current-voltage curves of metal/insulator/metal struc⁃tures.It was observed that within a range of 4-22 layers,the effective mass of h-BN exhibits a monotonic de⁃crease with an increase in the number of layers.The physical parameters of the Fowler-Nordheim tunneling model in the context of electron tunneling in h-BN are precisely ascertained by utilizing the extracted effective mass.Ad⁃ditionally,the impact of fixed charges at the metal/h-BN interface and various metal electrode types on FowlerNordheim tunneling within this structure is investigated utilizing this physical parameter in Sentaurus TCAD soft⁃ware.This work is informative and instructive in promoting applications in the fields of h-BN related infrared physics and technology.
