Electrical conductivities of micron-scale aluminum wires were quantitatively measured by a four-point atomic force microscope (AFM) probe. This technique is a combination of the principles of the four-point probe meth...Electrical conductivities of micron-scale aluminum wires were quantitatively measured by a four-point atomic force microscope (AFM) probe. This technique is a combination of the principles of the four-point probe method and standard AFM. This technique was applied to the 99.999% aluminum wires with 350 nm thickness and different widths of 5.0, 25.0 and 50.0μm. Since the small dimensions of the wires, the geometrical effects were discussed in details. Experiment results show that the four-point AFM probe is mechanically flexible and robust. The four-point AFM probe technique is capable of measuring surface topography together with local electrical conductivity simultaneously. The repeatable measurements indicate that this technique could be used for fast in-situ electrical properties characterization of sensors and microelectromechanical system devices.展开更多
Temperature is one of the physical quantifies through which quantitative evaluation of the safety and reliability of industrial products can be achieved, and this has been used widely in practice. Under any environmen...Temperature is one of the physical quantifies through which quantitative evaluation of the safety and reliability of industrial products can be achieved, and this has been used widely in practice. Under any environmental condifion, regardless of the size of the object to be inspected, accurate and reliable measurement of temperature is of great practical importance. This review article presents a simple and direct method of temperature measurement, that can be applied to the local areas with difficulty in measuring the temperature by using normal thermometers. In the present article, two different application examples are demonstrated. One addresses the study of the electromigration of solders which are used as bonding metals in electronic devices （micro-structures）. The application of the method to the shaft of a motor used in heavy industrial fields is explained as the second.展开更多
基金Project( 17206011) supported by the Japan Society for the Promotion of Science
文摘Electrical conductivities of micron-scale aluminum wires were quantitatively measured by a four-point atomic force microscope (AFM) probe. This technique is a combination of the principles of the four-point probe method and standard AFM. This technique was applied to the 99.999% aluminum wires with 350 nm thickness and different widths of 5.0, 25.0 and 50.0μm. Since the small dimensions of the wires, the geometrical effects were discussed in details. Experiment results show that the four-point AFM probe is mechanically flexible and robust. The four-point AFM probe technique is capable of measuring surface topography together with local electrical conductivity simultaneously. The repeatable measurements indicate that this technique could be used for fast in-situ electrical properties characterization of sensors and microelectromechanical system devices.
文摘Temperature is one of the physical quantifies through which quantitative evaluation of the safety and reliability of industrial products can be achieved, and this has been used widely in practice. Under any environmental condifion, regardless of the size of the object to be inspected, accurate and reliable measurement of temperature is of great practical importance. This review article presents a simple and direct method of temperature measurement, that can be applied to the local areas with difficulty in measuring the temperature by using normal thermometers. In the present article, two different application examples are demonstrated. One addresses the study of the electromigration of solders which are used as bonding metals in electronic devices （micro-structures）. The application of the method to the shaft of a motor used in heavy industrial fields is explained as the second.
