The performance of micro-/nano-electromechanical systems(M/NEMSs)has been significantly improved through the integration of two-dimensional(2D)nanomaterials such as graphene,transition metal chalcogenides and hexagona...The performance of micro-/nano-electromechanical systems(M/NEMSs)has been significantly improved through the integration of two-dimensional(2D)nanomaterials such as graphene,transition metal chalcogenides and hexagonal boron nitride,mainly due to their excellent mechanical strength,high electrical conductivity and superior thermal and chemical stability.Moreover,the fabrication,integration and functional properties of 2D nanomaterial-based M/NEMSs have been the subject of extensive research,especially regarding device reliability,packaging and pathways to large-scale commercialization.Furthermore,in the fields of biosensing and medical diagnostics,the inherent biocompatibility,photoactivity,and mechanical flexibility of 2D nanomaterials enable rapid response and high-sensitivity detection.Finally,future industrial applications will rely on scalable and cost-effective packaging solutions.The MEMS market is expected to grow at a compound annual growth rate(CAGR)of 7.9%,from$16.5 billion in 2024 to$24.2 billion in 2029.展开更多
基金supported by the National Key Research and Development Program of China(Grant No.2021YFB3700300)CAS-TWAS President’s Fellowship Programme for Doctoral Candidates(Grant Nos.2018CTF2969 and 2016CTF049)+3 种基金the National Natural Science Foundation of China(Grant Nos.U21B2093,52103015,51773218,and 31970041)the Youth Innovation Promotion Association of CAS(Grant No.2018338)the Programs supported by Ningbo Natural Science Foundation(Grant No.2021J207)the Public Welfare Science and Technology Projects of Ningbo(Grant No.2021S071).
文摘The performance of micro-/nano-electromechanical systems(M/NEMSs)has been significantly improved through the integration of two-dimensional(2D)nanomaterials such as graphene,transition metal chalcogenides and hexagonal boron nitride,mainly due to their excellent mechanical strength,high electrical conductivity and superior thermal and chemical stability.Moreover,the fabrication,integration and functional properties of 2D nanomaterial-based M/NEMSs have been the subject of extensive research,especially regarding device reliability,packaging and pathways to large-scale commercialization.Furthermore,in the fields of biosensing and medical diagnostics,the inherent biocompatibility,photoactivity,and mechanical flexibility of 2D nanomaterials enable rapid response and high-sensitivity detection.Finally,future industrial applications will rely on scalable and cost-effective packaging solutions.The MEMS market is expected to grow at a compound annual growth rate(CAGR)of 7.9%,from$16.5 billion in 2024 to$24.2 billion in 2029.
