The effect of the grounded electrode diameter on the ignition voltage using 13.56 MHz in argon gas is studied experimentMly. The results indicate a systematic decrease of the breakdown voltage with increasing electrod...The effect of the grounded electrode diameter on the ignition voltage using 13.56 MHz in argon gas is studied experimentMly. The results indicate a systematic decrease of the breakdown voltage with increasing electrode area for the same pd value. No multi-valued breakdown voltages are observed. The Paschen minimum is not affected by the electrode diameter as long as the parallel plane approximation is valid. A modified Paschen equation which takes into account indirect discharge via the chamber walls at high pd values gives reasonable fits to the experimental data.展开更多
文摘The effect of the grounded electrode diameter on the ignition voltage using 13.56 MHz in argon gas is studied experimentMly. The results indicate a systematic decrease of the breakdown voltage with increasing electrode area for the same pd value. No multi-valued breakdown voltages are observed. The Paschen minimum is not affected by the electrode diameter as long as the parallel plane approximation is valid. A modified Paschen equation which takes into account indirect discharge via the chamber walls at high pd values gives reasonable fits to the experimental data.
