This study proposes a novel heterodyne grating interferometer designed to meet the multi-dimensional atomiclevel measurement demands of next-generation lithography systems and large-scale atomic-level manufacturing.By...This study proposes a novel heterodyne grating interferometer designed to meet the multi-dimensional atomiclevel measurement demands of next-generation lithography systems and large-scale atomic-level manufacturing.By utilizing a dual-frequency laser source,the interferometer enables simultaneous three-degree-of-freedom(3-DOF)displacement measurements.Key innovations include a compact,zero dead-zone optical path architecture,which enhances measurement robustness by minimizing sensitivity to laser source instabilities and atmospheric refractive index fluctuations.In addition,we present a systematic crosstalk error analysis,coupled with a corresponding compensation algorithm,effectively reducing crosstalk-induced errors to below 5%.Experimental evaluation of the 90×90×40 mm^(3) prototype demonstrates outstanding performance metrics:sub-nanometer resolutions(0.25 nm for X/Y-axes,0.3 nm for Z-axis),superior linearity coefficients(6.9×10^(−5),8.1×10^(−5),16.2×10^(−5) for X-,Y-,and Z-axes,respectively),high repeatability(0.8 nm@1000 nm for all axes),exceptional long-term stability(20 nm XY-plane drift,60 nm Z-axis drift over 1000 s),and practical measurement ranges exceeding 10 mm inplane and 2 mm axially.Comparative analysis with state-of-the-art sensors demonstrates significant advantages in measurement precision,system integration,and multi-axis capability.This advancement highlights excellent potential for applications in integrated circuit fabrication,atomic-scale manufacturing,and ultra-precision metrology for aerospace systems.展开更多
Absolute measurement has consistently been the primary focus in the development of precision linear and angular displace-ment measurements.The scheme design of binary zero position codes is an important factor for abs...Absolute measurement has consistently been the primary focus in the development of precision linear and angular displace-ment measurements.The scheme design of binary zero position codes is an important factor for absolute measurement.Designing and optimizing high-bit zero position codes with over 100 bits face considerable challenges.Simultaneously,the working parameters of zero position codes[unit code width(b),distance(d),and yaw angle(α)]remarkably affect their post-installation performance,particularly in absolute positioning and limit code application in multi-degree-of-freedom measurement schemes.This study addresses these challenges by proposing a design method for zero position codes that considers diffraction based on generative adversarial networks and aims to explore a design with increased efficiency and accuracy as well as optimization for high-bit zero position codes.Additionally,the tolerance range of zero positioning per-formance for each working parameter is examined.By leveraging the adversarial network structure,this study generates the optimization of a 150-bit code and processes the tests of the zero position code by using simulation results.The following working parameter ranges for code design are recommended on the basis of theoretical and experimental results:b greater than 10μm,d andαwithin 1000μm and 3490μrad,and avoidance of intervals with sharp changes in the full width at half maximum.The proposed code design and parameter optimization lay a solid foundation for research and engineering appli-cations in absolute measurement field and have considerable potential for generalization and wide applicability.展开更多
基金supported by National Natural Science Foundation of China(NO.62275142)Shenzhen Stability Support Program Project(NO.WDZC 20231124201906001)Guangdong Basic and Applied Research Fund(NO.2021B1515120007).
文摘This study proposes a novel heterodyne grating interferometer designed to meet the multi-dimensional atomiclevel measurement demands of next-generation lithography systems and large-scale atomic-level manufacturing.By utilizing a dual-frequency laser source,the interferometer enables simultaneous three-degree-of-freedom(3-DOF)displacement measurements.Key innovations include a compact,zero dead-zone optical path architecture,which enhances measurement robustness by minimizing sensitivity to laser source instabilities and atmospheric refractive index fluctuations.In addition,we present a systematic crosstalk error analysis,coupled with a corresponding compensation algorithm,effectively reducing crosstalk-induced errors to below 5%.Experimental evaluation of the 90×90×40 mm^(3) prototype demonstrates outstanding performance metrics:sub-nanometer resolutions(0.25 nm for X/Y-axes,0.3 nm for Z-axis),superior linearity coefficients(6.9×10^(−5),8.1×10^(−5),16.2×10^(−5) for X-,Y-,and Z-axes,respectively),high repeatability(0.8 nm@1000 nm for all axes),exceptional long-term stability(20 nm XY-plane drift,60 nm Z-axis drift over 1000 s),and practical measurement ranges exceeding 10 mm inplane and 2 mm axially.Comparative analysis with state-of-the-art sensors demonstrates significant advantages in measurement precision,system integration,and multi-axis capability.This advancement highlights excellent potential for applications in integrated circuit fabrication,atomic-scale manufacturing,and ultra-precision metrology for aerospace systems.
基金supported by the National Natural Science Foundation of China with No.62275142the Basic and Applied Basic Research Foundation of Guangdong Province with No.2021B1515120007.
文摘Absolute measurement has consistently been the primary focus in the development of precision linear and angular displace-ment measurements.The scheme design of binary zero position codes is an important factor for absolute measurement.Designing and optimizing high-bit zero position codes with over 100 bits face considerable challenges.Simultaneously,the working parameters of zero position codes[unit code width(b),distance(d),and yaw angle(α)]remarkably affect their post-installation performance,particularly in absolute positioning and limit code application in multi-degree-of-freedom measurement schemes.This study addresses these challenges by proposing a design method for zero position codes that considers diffraction based on generative adversarial networks and aims to explore a design with increased efficiency and accuracy as well as optimization for high-bit zero position codes.Additionally,the tolerance range of zero positioning per-formance for each working parameter is examined.By leveraging the adversarial network structure,this study generates the optimization of a 150-bit code and processes the tests of the zero position code by using simulation results.The following working parameter ranges for code design are recommended on the basis of theoretical and experimental results:b greater than 10μm,d andαwithin 1000μm and 3490μrad,and avoidance of intervals with sharp changes in the full width at half maximum.The proposed code design and parameter optimization lay a solid foundation for research and engineering appli-cations in absolute measurement field and have considerable potential for generalization and wide applicability.
