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ECR Sputter Feed Developments at NSCL
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作者 D.Cole G.Machicoane +1 位作者 l.tobos P.Zavodszky 《Chinese Physics C》 SCIE CAS CSCD 北大核心 2007年第S1期239-239,共1页
Production of metallic ion beams in support of the experimental program at the Coupled Cyclotron Facility at the NSCL required the development of ion sputtering feed of metallic molybdenum,nickel,uranium, and zirconiu... Production of metallic ion beams in support of the experimental program at the Coupled Cyclotron Facility at the NSCL required the development of ion sputtering feed of metallic molybdenum,nickel,uranium, and zirconium for use with the ARTEMIS ion source.The production of high intensity lower to medium charge state ions required high material consumption,posing some significant difficulties in reliable long term beam stability.Resultant and ongoing hardware and technique developments to resolve these difficulties will be presented in this poster along with interesting effects of the ion source solenoid field polarity on the sputtering process. 展开更多
关键词 金属离子 研究进展 溅射
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