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Optimal 3D chemical imaging with multimodal electron tomography
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作者 jason manassa William Millsaps +1 位作者 Jonathan Schwartz Robert Hovden 《npj Computational Materials》 2025年第1期2974-2982,共9页
Accurate mapping of nanoscale chemistry in three dimensions(3D)has been a longstanding challenge.Modern electron microscopy provides chemical images by electron energy loss spectroscopy(EELS)and energy dispersive x-ra... Accurate mapping of nanoscale chemistry in three dimensions(3D)has been a longstanding challenge.Modern electron microscopy provides chemical images by electron energy loss spectroscopy(EELS)and energy dispersive x-ray spectrometry(EDX)but requires high fluences that damage specimens.In 3D,the requirements are worse;electron tomography demands many highfluence chemical maps for reconstruction,creating a tradeoff between resolution,accuracy,and sample survival.Fused multimodal electron tomography(MM-ET)alleviates this requirement by leveraging lower-fluence high-angle annular dark-field(HAADF)images alongside a few chemical maps to dramatically improve chemical resolution.Here,experimental and computational parameter space is systematically explored to determine when MM-ET performs best.Ideal imaging conditions balance sample survival with resolution and chemical specificity;we recommend a tilt range of at least±70°,acquiring 40 equally spaced HAADF projections(signal-to-noise>10),and 7 EELS/EDX maps of each chemistry(signal-to-noise>4). 展开更多
关键词 optimal d chemical imaging electron energy loss spectroscopy eels nanoscale chemistry multimodal electron tomography mm et allevia energy dispersive x ray spectrometry multimodal electron tomography chemical images electron energy loss spectroscopy
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