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Design and fabrication of superconducting transition edge sensor bolometers with background limited noise performance 被引量:1
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作者 Qingya Zhang Jianshe Liu +5 位作者 Wenhui Dong Tianshun Wang genfang he Tiefu Li Xingxiang Zhou Wei Chen 《Chinese Science Bulletin》 SCIE EI CAS 2014年第19期2292-2297,共6页
We successfully designed and fabricated TES bolometers utilizing Al/Ti bilayer TESs as sensitive thermometers.To reduce the intrinsic noise level and tune the saturation power of a bolometer,the TES thermometer is pla... We successfully designed and fabricated TES bolometers utilizing Al/Ti bilayer TESs as sensitive thermometers.To reduce the intrinsic noise level and tune the saturation power of a bolometer,the TES thermometer is placed on a suspended SiN platform which is thermally coupled to the heat bath by four long SiN beams with different geometries.The measurement results show that the detectors have background limited noise performance,with a low noise equivalent power(NEP)on the order of10-17W/Hz1/2and have a saturation power of several tens pW at a bath temperature of 320 mK.These detectors are suitable for applications in ground-based astrophysics experiments by integrating absorbers for specific wavelengths. 展开更多
关键词 测辐射热计 噪声性能 超导转变 制造 设计 传感器 饱和功率 检测器具
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