We successfully designed and fabricated TES bolometers utilizing Al/Ti bilayer TESs as sensitive thermometers.To reduce the intrinsic noise level and tune the saturation power of a bolometer,the TES thermometer is pla...We successfully designed and fabricated TES bolometers utilizing Al/Ti bilayer TESs as sensitive thermometers.To reduce the intrinsic noise level and tune the saturation power of a bolometer,the TES thermometer is placed on a suspended SiN platform which is thermally coupled to the heat bath by four long SiN beams with different geometries.The measurement results show that the detectors have background limited noise performance,with a low noise equivalent power(NEP)on the order of10-17W/Hz1/2and have a saturation power of several tens pW at a bath temperature of 320 mK.These detectors are suitable for applications in ground-based astrophysics experiments by integrating absorbers for specific wavelengths.展开更多
基金supported by the National Basic Research Program of China (2011CBA00304)Tsinghua University Initiative Scientific Research Program (20131089314) the National Natural Science Foundation of China (60836001 and 11273023)
文摘We successfully designed and fabricated TES bolometers utilizing Al/Ti bilayer TESs as sensitive thermometers.To reduce the intrinsic noise level and tune the saturation power of a bolometer,the TES thermometer is placed on a suspended SiN platform which is thermally coupled to the heat bath by four long SiN beams with different geometries.The measurement results show that the detectors have background limited noise performance,with a low noise equivalent power(NEP)on the order of10-17W/Hz1/2and have a saturation power of several tens pW at a bath temperature of 320 mK.These detectors are suitable for applications in ground-based astrophysics experiments by integrating absorbers for specific wavelengths.