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铌酸锂单晶悬臂梁MEMS振动传感器的性能 被引量:2
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作者 魏慧芬 穆继亮 +1 位作者 耿文平 丑修建 《微纳电子技术》 CAS 北大核心 2022年第7期665-671,724,共8页
研究了基于铌酸锂压电单晶薄膜悬臂梁的微电子机械系统(MEMS)振动传感器的结构设计和加工工艺,并在宽频带和宽温度范围条件下对传感器进行了输出性能测试。结果表明,所制备的传感器固有频率接近于设计的目标频率;输出电荷呈正弦波形且... 研究了基于铌酸锂压电单晶薄膜悬臂梁的微电子机械系统(MEMS)振动传感器的结构设计和加工工艺,并在宽频带和宽温度范围条件下对传感器进行了输出性能测试。结果表明,所制备的传感器固有频率接近于设计的目标频率;输出电荷呈正弦波形且其振幅随着振动加载加速度的幅值线性增长;当加载加速度为10g、频率为20~2200 Hz时,传感器的输出电荷比较平稳;传感器在70℃时的平均输出电荷较常温条件下的提升了19.6%;在-40℃时平均输出电荷虽下降了18%,但仍保持良好的电荷输出水平,体现了该振动传感器的鲁棒性。所研究开发的MEMS振动传感器制备工艺简单、输出特性高,在高频微振动监测方面具有较好的应用前景。 展开更多
关键词 微电子机械系统(MEMS) 振动传感器 双悬臂梁 铌酸锂单晶 鲁棒性
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压电MEMS振动传感器调理电路设计与实现 被引量:3
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作者 武晓慧 张慧毅 +2 位作者 耿文平 郭涛 丑修建 《测试技术学报》 2024年第3期330-336,共7页
针对铌酸锂单晶薄膜的压电MEMS振动传感器输出电荷信号微弱而难以采集的问题,设计了一种基于集成运放芯片TLE 2064 CDR的信号调理电路。该电路由电荷-电压转换电路(Q-V)、电压放大电路、前置低通滤波电路和后置高通滤波电路构成,旨在实... 针对铌酸锂单晶薄膜的压电MEMS振动传感器输出电荷信号微弱而难以采集的问题,设计了一种基于集成运放芯片TLE 2064 CDR的信号调理电路。该电路由电荷-电压转换电路(Q-V)、电压放大电路、前置低通滤波电路和后置高通滤波电路构成,旨在实现微弱信号的采集。此外,利用ACT 2000振动台进行振动实验,通过标准电荷放大器和设计的信号调理电路对压电MEMS振动传感器测试。测试结果表明,所设计的信号调理电路与标准电荷放大器的输出有较好的一致性,可以满足5~130 pC的宽输入电荷的采集。当加载加速度范围为5~20 g时,输出电荷和输入加速度之间的线性度好;在输入加速度5 g,工作频率范围为50~2000 Hz时,输出电荷偏差控制在±1.6 pC内,具有很好的一致性。综上所述,该电路具有集成度高,灵敏度好等特点,在微弱信号采集方面具有很好的应用前景。 展开更多
关键词 压电MEMS振动传感器 调理电路 滤波设计 信号放大 电荷放大器
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三维硅基电容器W薄膜电极特性及影响 被引量:1
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作者 穆继亮 耿文平 +1 位作者 何剑 丑修建 《半导体技术》 CAS CSCD 北大核心 2018年第10期771-776,共6页
设计了一种三维(3D)硅基电容器,采用原子层沉积(ALD)技术制备了钨(W)薄膜电极。通过X射线光电子能谱(XPS)、X射线衍射(XRD)、扫描电子显微镜(SEM)和电学分析仪对薄膜进行表征,研究了W薄膜电学性能的影响因素和作用机制。XP... 设计了一种三维(3D)硅基电容器,采用原子层沉积(ALD)技术制备了钨(W)薄膜电极。通过X射线光电子能谱(XPS)、X射线衍射(XRD)、扫描电子显微镜(SEM)和电学分析仪对薄膜进行表征,研究了W薄膜电学性能的影响因素和作用机制。XPS测试结果表明,W薄膜组分主要为W—W键金属态,测得其电阻率为77μΩ·cm,达到现有技术水平。由晶相分析可知,原子层沉积W薄膜是多晶相,且两端电极薄膜中均存在α-W和β-W两种晶相,其中,β-W相是导致电阻率升高的主要因素。最后,对电容器进行了C-V和I-V测试,结果表明,对于3D电容器,所制备的W薄膜电极具有良好的电学性能。 展开更多
关键词 硅基 三维(3D)电容器 原子层沉积(ALD) 钨薄膜 金属态
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一体化仿生结构压电MEMS水声传感器 被引量:1
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作者 石树正 耿文平 +2 位作者 毕开西 李芬 丑修建 《微纳电子技术》 CAS 北大核心 2022年第1期50-57,共8页
为了实现水声传感器的低能耗、高灵敏度以及低成本批量制造,设计并制备了一种四螺旋梁集成拾振微球的一体化仿生压电微电子机械系统(MEMS)水声传感器。根据水母耳石触觉结构和水母身体回弹发电原理对该传感器进行仿生结构设计,并通过建... 为了实现水声传感器的低能耗、高灵敏度以及低成本批量制造,设计并制备了一种四螺旋梁集成拾振微球的一体化仿生压电微电子机械系统(MEMS)水声传感器。根据水母耳石触觉结构和水母身体回弹发电原理对该传感器进行仿生结构设计,并通过建模仿真确定其几何尺寸。利用溶胶-凝胶法制备了PbZr_(0.52)Ti_(0.48)O_(3)(PZT)压电薄膜,实现了压电层与Si晶圆片的异质集成,使用MEMS工艺制造了传感器件并完成封装。通过水声校准系统进行接收灵敏度测试,结果表明水声传感器的灵敏度达到-184.63 dB,表现出良好的灵敏度特性。对促进无源水声传感系统的发展和解决深海环境中微弱信号的灵敏识别、探测等技术难题具有重要意义。 展开更多
关键词 微电子机械系统(MEMS) 水声传感器 仿生结构 压电效应 异质集成
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压电MEMS振动传感器信号采集系统设计与实现 被引量:1
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作者 武晓慧 耿文平 丑修建 《测试技术学报》 2024年第6期695-702,共8页
针对硅基铌酸锂单晶薄膜压电MEMS振动传感器产生振动信号的特征,设计了基于FPGA平台的数据采集系统。该系统采用AD7606采样芯片,结合状态机的思想,完成了AD采样设计的时序图,实现了数据转换,转换后的数据使用FIFO进行存储,之后通过USB ... 针对硅基铌酸锂单晶薄膜压电MEMS振动传感器产生振动信号的特征,设计了基于FPGA平台的数据采集系统。该系统采用AD7606采样芯片,结合状态机的思想,完成了AD采样设计的时序图,实现了数据转换,转换后的数据使用FIFO进行存储,之后通过USB 2.0传输到上位机进行处理。最后搭建了实物验证平台,利用此系统采集振动台输出的振动信号,并用MATLAB对采集到的振动信号进行分析。实验结果表明,当加载加速度为3~20 g时,采集到的电荷与输入加速度之间有较好的线性度。该采样系统能够满足一定的采样速率要求,在压电MEMS振动传感器信号采集领域有广阔的应用前景。 展开更多
关键词 压电MEMS振动传感器 电荷放大器 数据采集 加载加速度 电荷灵敏度
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电压调控Pt/Fe_(3)O_(4)异质结构磁性能研究
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作者 张乐 李陶 +3 位作者 耿文平 何剑 崔浩然 穆继亮 《半导体技术》 CAS 北大核心 2022年第7期513-517,523,共6页
电压调控磁电功能器件具有微型化、低功耗以及超快响应的突出优势,受到学术界与工业界的广泛关注。然而,对于在外加电压作用下离子液体(IL)双电层效应诱导界面电场对磁性能调控的研究却鲜有报道。系统研究了双(三氟甲基磺酰基)二酰亚胺... 电压调控磁电功能器件具有微型化、低功耗以及超快响应的突出优势,受到学术界与工业界的广泛关注。然而,对于在外加电压作用下离子液体(IL)双电层效应诱导界面电场对磁性能调控的研究却鲜有报道。系统研究了双(三氟甲基磺酰基)二酰亚胺二乙基甲基(2-甲氧基乙基)铵(DEME-TFSI)对Pt/Fe_(3)O_(4)异质结构磁性能的调控机制,通过测量不同电压范围内Pt/Fe_(3)O_(4)异质结构的铁磁共振(FMR)谱线,研究了共振场磁场强度随外加电压的变化规律。实验结果表明,当外加电压达到5 V时,可实现对面外共振场磁场强度达377 Oe(1 A/m=4π×10^(-3)Oe)的调控,并且表现出优异的循环往复性能,这对磁性器件长期稳定使用具有重要意义。其原因是Pt层可以阻止电压调控过程中IL与Fe_(3)O_(4)薄膜之间的不可逆电化学反应的发生。该研究可为基于电压调控磁电耦合器件的开发提供理论参考。 展开更多
关键词 磁电耦合 离子液体(IL) 电压调控 双电层效应 异质结构
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d_(31)模式四悬臂梁压电MEMS加速度计
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作者 石树正 耿文平 +3 位作者 刘勇 毕开西 李芬 丑修建 《兵工学报》 EI CAS CSCD 北大核心 2022年第8期1998-2006,共9页
针对高灵敏度无源加速度计的集成制造需求,提出一种d工作模式下四悬臂梁集成拾振微球的MEMS压电加速度计敏感结构。建立动力学振动和拾振理论模型,并使用COMSOL 5.0软件对传感器件结构进行建模仿真,通过优化确定满足拾振条件的微器件几... 针对高灵敏度无源加速度计的集成制造需求,提出一种d工作模式下四悬臂梁集成拾振微球的MEMS压电加速度计敏感结构。建立动力学振动和拾振理论模型,并使用COMSOL 5.0软件对传感器件结构进行建模仿真,通过优化确定满足拾振条件的微器件几何尺寸和结构。利用溶胶凝胶方法实现硅基高品质PZT压电薄膜的异质集成制造,使用MEMS工艺制造微器件并完成传感器的集成和组装。测试结果表明:该加速度计的输入加速度与输出电压的关系为V=1.881a-0.033,电压灵敏度在1152 Hz时达到13.8 mV/g,表现出良好的灵敏度、线性度和抗干扰能力;新方法具有正确性和工艺方法的可行性,为高性能加速度传感器件提供了一种新的技术途径。 展开更多
关键词 微机电系统 d_(31)压电加速度计 灵敏度 拾振微球 锆钛酸铅
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PbZr0.3Ti0.7O3薄膜退火工艺优化及铁电畴结构表征 被引量:2
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作者 耿文平 乔骁骏 丑修建 《微纳电子技术》 北大核心 2018年第10期746-750,共5页
采用溶胶一凝胶工艺研究了不同退火温度和气氛下PbZr0.3 Ti0.7 O3(PZT)薄膜的晶格结构和表面形貌。在空气中600~700℃退火时,薄膜完全结晶,结晶取向由(100)方向逐渐向(111)方向过渡,且结晶度增强;温度继续升高,薄膜发生热... 采用溶胶一凝胶工艺研究了不同退火温度和气氛下PbZr0.3 Ti0.7 O3(PZT)薄膜的晶格结构和表面形貌。在空气中600~700℃退火时,薄膜完全结晶,结晶取向由(100)方向逐渐向(111)方向过渡,且结晶度增强;温度继续升高,薄膜发生热分解,结晶性变差,但700℃时晶体仍为纯钙钛矿相结构,800℃时薄膜转变为非晶态。采用不同气氛退火方式研究了薄膜的结晶行为,通过调控氧空位实现对薄膜结晶性调控,优化了PZT薄膜退火工艺(即空气或氮气中700℃退火);对退火工艺优化后制备的(111)择优取向PZT薄膜进行了面外和面内铁电畴成像,分析了薄膜中180°铁电畴的存在形式。 展开更多
关键词 铁电薄膜 PZT 溶胶-凝胶 退火 铁电畴
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温度对(Pb0.97La0.02)(Zr0.95Ti0.05)O3反铁电薄膜储能行为的影响 被引量:1
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作者 耿文平 乔骁骏 +1 位作者 穆继亮 丑修建 《半导体技术》 CAS CSCD 北大核心 2018年第11期858-862,共5页
反铁电薄膜因其利用反铁电-铁电相变实现高效能量存储(即高储能密度和高储能效率)成为目前国际上研究热点,然而对其储能行为随温度变化规律研究甚少。系统研究了锆钛酸铅基反铁电薄膜(Pb0.97La0.02)(Zr0.95Ti0.05)O3的制备和性能... 反铁电薄膜因其利用反铁电-铁电相变实现高效能量存储(即高储能密度和高储能效率)成为目前国际上研究热点,然而对其储能行为随温度变化规律研究甚少。系统研究了锆钛酸铅基反铁电薄膜(Pb0.97La0.02)(Zr0.95Ti0.05)O3的制备和性能表征;测量了不同温度下薄膜的电滞回线,室温下薄膜饱和极化强度约为35. 37μC/cm^2,随着温度的升高,饱和极化强度降低,同时薄膜从反铁电相依次相变为铁电相、顺电相;研究了反铁电薄膜有效储能密度及能量转换效率,室温下反铁电薄膜的有效储能密度约为7. 73 J/cm^3,能量转换效率约为49%,随温度升高,有效储能密度降低而能量转换效率保持不变。 展开更多
关键词 反铁电 饱和极化强度 能量存储 电滞回线 锆钛酸铅 电容器
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Human movement monitoring and behavior recognition for intelligent sports using customizable and flexible triboelectric nanogenerator 被引量:10
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作者 YANG Yun HOU XiaoJuan +6 位作者 geng wenping MU JiLiang ZHANG Le WANG XiangDong HE Jian XIONG Ji Jun CHOU XiuJian 《Science China(Technological Sciences)》 SCIE EI CAS CSCD 2022年第4期826-836,共11页
Effective collection,recognition,and analysis of sports information is the key to intelligent sports,which can help athletes to improve their skills and formulate scientific training plans and competition strategies.A... Effective collection,recognition,and analysis of sports information is the key to intelligent sports,which can help athletes to improve their skills and formulate scientific training plans and competition strategies.At present,wearable electronic devices used for movement monitoring still have some limitations,such as high cost and energy consumption,incompatibility of suitable flexibility and personalized spatial structure,dissatisfactory data analysis methods,etc.In this work,a novel three-dimensionalprinted thermoplastic polyurethane is introduced as the elastic shell and friction layer,and it endows the proposed customizable and flexible triboelectric nanogenerator(CF-TENG)with personalized spatial structure and robust correlation to external pressure.In practical application,it exhibits highly sensitive responses to the joint-bending motion of the finger,wrist,or elbow.Furthermore,a pressure-sensing insole and smart ski pole based on CF-TENG are manufactured to build a comprehensive sports monitoring system to transmit the athletes’motion information from feet and hands through the plantar pressure distribution and ski pole action.To recognize the movement status,the self-developed automatic peak recognition algorithm(P-Find)and machine learning algorithm(subspace K-Nearest Neighbors)were introduced to accurately distinguish the four typical motion behaviors and three primary sub-techniques of cross-country skiing,with accuracy rates of 98.2%and 100%.This work provides a novel strategy to promote the personalized applications of TENGs in intelligent sports. 展开更多
关键词 triboelectric nanogenerator FLEXIBLE movement monitoring behavior recognition intelligent sports
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Porous fiber paper and 3D patterned electrodes composed high-sensitivity flexible piezoresistive sensor for physiological signal monitoring 被引量:5
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作者 HOU XiaoJuan ZHONG JiXin +6 位作者 HE Jian YANG ChangJun YU JunBin MEI LinYu MU JiLiang geng wenping CHOU XiuJian 《Science China(Technological Sciences)》 SCIE EI CAS CSCD 2022年第5期1169-1178,共10页
The research on flexible pressure sensors has drawn widespread attention in recent years,especially in the fields of health care and intelligent robots.In practical applications,the sensitivity of sensors directly aff... The research on flexible pressure sensors has drawn widespread attention in recent years,especially in the fields of health care and intelligent robots.In practical applications,the sensitivity of sensors directly affects the precision and integrity of weak pressure signals.Here,a pressure sensor with high sensitivity and a wide measurement range composed of porous fiber paper and 3D patterned electrodes is proposed.Multi-walled carbon nanotubes with excellent conductivity were evenly sprayed on the fiber paper to form the natural spatial conducting networks,while the copper-deposited polydimethylsiloxane films with micropyramids array were used as electrodes and flexible substrates.Increased conducting paths between electrodes and fibers can be obtained when high-density micro-pyramids fall into the porous structures of the fiber paper under external pressure,thereby promoting the pressure sensor to show an ultra-high sensitivity of 17.65 kPa^(-1)in the pressure range of 0–2 kPa,16 times that of the device without patterned electrodes.Besides,the sensor retains a high sensitivity of 2.06 kPa^(-1)in an ultra-wide measurement range of 150 kPa.Moreover,the sensor can detect various physiological signals,including pulse and voice,while attached to the human skin.This work provides a novel strategy to significantly improve the sensitivity and measurement range of flexible pressure sensors,as well as demonstrates attractive applications in physiological signal monitoring. 展开更多
关键词 flexible pressure sensor high sensitivity wide measurement range fiber paper 3D patterned electrodes physiological signal monitoring
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A static-dynamic energy harvester for a self-powered ocean environment monitoring application 被引量:5
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作者 XUE Feng CHEN Liang +7 位作者 LI ChunCheng REN Jing YU JunBin HOU XiaoJuan geng wenping MU JiLiang HE Jian CHOU XiuJian 《Science China(Technological Sciences)》 SCIE EI CAS CSCD 2022年第4期893-902,共10页
Ocean intelligent buoy is important for ocean environment monitoring.With the increase of requisite sensors and transportable data,a long power supply has become a problem to be solved urgently.In this work,a hybrid n... Ocean intelligent buoy is important for ocean environment monitoring.With the increase of requisite sensors and transportable data,a long power supply has become a problem to be solved urgently.In this work,a hybrid nanogenerator integrating triboelectric,piezoelectric,electromagnetic,photovoltaic,and thermotropic units is proposed to maximize ocean ambient energy harvesting,which includes static energy(solar and thermal energy)and dynamic energy(wave energy).Compared with a device with a single energy conversion mechanism,this structural design breaks the limit of harvesting time and natural conditions during the energy harvesting process,thereby increasing the harvested energy.Static energy harvesting is realized by the thermoelectric(TG)and photovoltaic(PV)units located inside the device and the PV unit attached to the device surface.Results show that the maximum open-circuit voltage and short-circuit current are 5 V and 41 mA in the external PV and 1.33 V and 49 mA in the internal PV under 30000 Lux illumination,respectively.The open-circuit voltage and short-circuit current of the TG unit are 5 V and 15 m A,respectively.The core component of the dynamic generation unit is the gimbal used to harvest wave energy by the triboelectric nanogenerator(TENG),piezoelectric generator(PENG),and electromagnetic generator.When the frequency is 2.4 Hz,the maximum peak-to-peak power of the TENG,PENG,and EMG are 0.25,1.58,and 13.8 mW,respectively.Finally,an intelligent ocean buoy is fabricated by the integration of an energy harvester,a power management circuit,sensors,a microcontroller,and a wireless communication module.Driven by static and dynamic energy,temperature signal,humidity signal,GPS signal,and sound signal are sent to the receiving terminal wirelessly.The ocean energy harvester proposed in this work is of great significance for ocean energy harvesting and ocean wireless monitoring systems. 展开更多
关键词 hybrid nanogenerator static energy dynamic energy energy harvester wireless monitoring system
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Flexible multilayer MEMS coils and their application in energy harvesters 被引量:2
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作者 ZHANG Jie HOU XiaoJuan +7 位作者 QIAN Shuo BI XiaoXue HU DongXu LIU JianJun geng wenping MU JiLiang HE Jian CHOU XiuJian 《Science China(Technological Sciences)》 SCIE EI CAS CSCD 2024年第4期1282-1293,共12页
Electromagnetic vibration energy harvesters are promising for the power supply of wireless sensor nodes,small electronic devices,and wearable electronics.Conventional electromagnetic harvesters usually increase output... Electromagnetic vibration energy harvesters are promising for the power supply of wireless sensor nodes,small electronic devices,and wearable electronics.Conventional electromagnetic harvesters usually increase output by increasing the size of coils and magnets,limiting the improvement of energy conversion efficiency and power density.In this study,multilayer microelectromechanical system(MEMS)coils were prepared using flexible electronics,and their high integration performance in arbitrary space was utilized to greatly improve the utilization of the space magnetic field by the electromagnetic harvester.The core magnet of the generator was magnetically balanced to achieve levitation,which improved the sensitivity and reduced fatigue damage compared with traditional spring structures.The wound coils on the top and bottom of the magnet and the flexible coils on the sides worked together to improve the energy efficiency and output of the devices.The output performance of the device with different number distributions was simulated using mathematical models to obtain the optimal structural parameters.The results show that by introducing flexible multilayer MEMS coils on the side surface of the energy harvester,the open-circuit voltage of the energy generators increased from 7 to 10 V by more than 43%.Flexible multilayer MEMS coils can enhance energy conversion rates and possess compact dimensions,making them suitable for integration onto complex surfaces.After the vibration energy harvesting system testing,the maximum peak power of the harvester was 7.1 m W at an acceleration of1 g and a resonant frequency of 11 Hz with a resistor of 3.5 kΩinternal resistance.Moreover,a 470μF capacitor can be charged to 3.5 V within 10 s to drive a hygrothermograph to work for more than 80 s and can supply a light bulb continuously.This strategy shows the great potential of vibration-energy-driven electromagnetic generators for powering small electronics in limited spaces. 展开更多
关键词 electromagnetic harvester mechanical energy harvesting multilayer MEMS coils magnetic levitation overall space magnetic field flexible planar coils
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A high-performance electromagnetic energy harvester for scavenging ultra-low frequency vibration energy of human foot movement 被引量:2
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作者 HU JiaJun QIAN Shuo +9 位作者 WU Hui HU DongXu NIU LiXin BI XiaoXue ZHANG Jie HOU XiaoJuan geng wenping MU JiLiang HE Jian CHOU XiuJian 《Science China(Technological Sciences)》 SCIE EI CAS CSCD 2024年第5期1391-1400,共10页
In our daily lives,low-frequency kinetic energy primarily manifests as vibrations.However,effective harnessing of lowfrequency kinetic energy remains a formidable challenge.This paper proposes a rope-driven rotor that... In our daily lives,low-frequency kinetic energy primarily manifests as vibrations.However,effective harnessing of lowfrequency kinetic energy remains a formidable challenge.This paper proposes a rope-driven rotor that rotates around an axis and consists of an ultra-high-molecular-weight polyethylene(UHMWPE)wire wrapped around a metal shaft.The rotor can convert ultra-low frequency vibration/linear motion into rapid rotation by pressing the top at low frequencies and driving the rope for a quick release.The harvester can generate up to 36.25 m W power using a 0.1-mm-diameter UHMWPE wire as the rotor when periodically pressed down to 20 mm at a frequency of 1 Hz.A simple power generation floor is assembled,generating 28.58-m W power with a matching load at a frequency of 1.5 Hz.Moreover,the harvester can increase the charging voltage of a 0.47-F supercapacitor from 0 to 6.8 V within 10 min.In addition,the harvester can harvest energy through a light finger press motion,and the energy obtained can also support the continuous operation of multiple electronic devices concurrently.This study introduces an effective method for harvesting ultra-low frequency energy and has great prospects in the field of power generation floor and human movement energy harvesting. 展开更多
关键词 electromagnetic energy harvester rope-shaft coupling structure human motion ultra-low frequency
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High-density stacked microcoils integrated microminiaturized electromagnetic vibration energy harvester for self-powered acceleration sensing 被引量:1
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作者 HOU XiaoJuan ZHANG RuoYang +6 位作者 BI XiaoXue ZHAO HuiPeng ZHANG Jie ZHU Jie geng wenping HE Jian CHOU XiuJian 《Science China(Technological Sciences)》 SCIE EI CAS CSCD 2023年第12期3369-3380,共12页
With the rapid development of microelectronics and flexible electronics technology,self-powered sensors have significant application prospects in human-machine interface systems and Internet of Things.However,piezoele... With the rapid development of microelectronics and flexible electronics technology,self-powered sensors have significant application prospects in human-machine interface systems and Internet of Things.However,piezoelectric-and triboelectricbased sensors have low current output and are easily affected,while electromagnetic-based sensors are difficult to miniaturize.This work proposes a high-density stacked microcoil integrated microminiaturized electromagnetic vibration energy harvester(EVEH).The double-layer high-density microcoil is fabricated on both sides of the flexible polyimide substrate interconnected via the central through-hole.Owing to reduced single coil line width,line spacing,and stacked structure,the number of turns can be substantially enhanced.Moreover,the relative position of the coils and magnet has a considerable influence on the performances;due to the huge change rate in magnetic flux when the coil is placed in the radial direction of the magnet than in the axial direction,the open-circuit voltage in the radial direction is 10 times greater.The microcoil can maintain good performance at high,low temperatures and under bending conditions.When the distance between the ends of the coil changes from 2 to 20 mm in 2 mm steps,the bending angle of the coil changes from 45°to 270°in 45°steps;furthermore,when the coil is exposed to-40and 60℃conditions,the coil resistance is maintained at approximately 447Ω.The peak open-circuit voltage of three-piece microcoils reaches 0.41 V at 4 Hz under 2g,and the output voltage and current increase with an increasing number of stacked layers.These excellent properties indicate that EVEH can be used for self-powered acceleration sensing.The sensitivity is measured to be 0.016 V/(m/s^(2))with a correlation coefficient of 0.979 over the acceleration range of 1–18 m/s^(2).Thus,the developed microminiaturized EVEH has enormous potential for self-powered sensing applications in confined spaces and harsh environments. 展开更多
关键词 electromagnetic vibration energy harvester axial direction radial direction high-density stacked microcoils acceleration sensor
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Research on thermal cyclization polyacrylonitrile enhanced piezoelectric performances of a flexible electronic skin sensor 被引量:1
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作者 JIA XuYing MU JiLiang +7 位作者 WU Qiong YANG DongKuan LUO ZhongKe LIN JunFei geng wenping HOU XiaoJuan HE Jian CHOU XiuJian 《Science China(Technological Sciences)》 CSCD 2024年第12期3855-3866,共12页
Electronic skin(e-skin)is a research focus in the fields of robotics design,artificial prosthetics,and wearable electronics.When used for long-term unattended monitoring,several key problems,such as energy supply,sens... Electronic skin(e-skin)is a research focus in the fields of robotics design,artificial prosthetics,and wearable electronics.When used for long-term unattended monitoring,several key problems,such as energy supply,sensing performance,and structural design,have attracted increasing attention.This study reports a self-powered flexible e-skin sensor(FES)based on the thermal cyclization of polyacrylonitrile,which enhances the piezoelectric effect.It mainly consists of nanoscale polyacrylonitrile(PAN),Ecoflex,and flexible PCB electrodes.PAN is mixed as a piezoelectric functional material in the Ecoflex substrate,forming a flexible sensing module.To enhance charge accumulation,PAN is initially electrospun into nanofibers and subsequently modified through a thermal treatment process.This procedure results in the formation of a conjugated trapezoid structure within PAN and significantly increases its molecular dipole moment.Due to the contribution of numerous nanocapacitors,the piezoelectric properties of the sensing module are significantly improved.To ensure durability,flexible PCBs were designed as the top and bottom electrodes of the sensing module via industrial board lamination and forming processes,also serving as packaging.Additionally,a human-computer interaction(HMI)system for e-skin measurement was developed,enabling realtime signal processing between the e-skin and the computer.On the basis of the good combination of piezoelectric nanoparticles,an Ecoflex substrate,and flexible PCBs,FES can reach 0.67 V/kPa and 0.99 voltage sensitivity and voltage linearity,respectively,under self-powered conditions under external pressure,and the detection range can reach 40–650 kPa.On the basis of the good performance of FES devices,such as their self-powered ability,long-term serviceability,high sensitivity,wide monitoring range,and various optimized designs for later circuits,the e-skin designed in this paper has important applications in the fields of HMI,personality recognition,and medical research. 展开更多
关键词 e-skin PAN wearable sensors ELECTROSPINNING PIEZOELECTRIC HMI
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Wide measurement range and high sensitivity spongy MWCNT/polydimethylsiloxane pressure sensor based on a single-electrode enhanced triboelectric nanogenerator
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作者 XIE Xin HOU XiaoJuan +7 位作者 QIAN Shuo HOU JianWei ZHANG Jie BI XiaoXue geng wenping MU JiLiang HE Jian CHOU XiuJian 《Science China(Technological Sciences)》 SCIE EI CAS CSCD 2023年第6期1734-1745,共12页
Flexible pressure sensors have broad application prospects,such as human motion monitoring and personalized recognition.However,their applicability is limited by complex structures,low output performance,low sensitivi... Flexible pressure sensors have broad application prospects,such as human motion monitoring and personalized recognition.However,their applicability is limited by complex structures,low output performance,low sensitivity,and narrow measurement range.In this study,we report a single-electrode spongy triboelectric sensor(SSTS)mainly composed of spongy composite multi-walled carbon nanotubes/polydimethylsiloxane(MWCNT/PDMS)film and conductive fabric,which can simultaneously generate contact electrification and electrostatic induction coupling in a single-electrode contact-separation mode.The SSTS combines the triboelectric effect,properties of doping material,and spongy porous structure(soft sugar as a sacrificial template).An SSTS with an MWCNT content of 10 wt%and a porosity of 64%exhibits high sensitivity,a wide measurement range,and excellent linearity.It also displays two sensitivity regions(slopes):1.324 V/kPa from 1.5 to 28 kPa in the low-pressure range and 0.096 V/kPa from 28 to 316.5 kPa in the high-pressure range,with linearities of 0.980 and 0.979,respectively.Furthermore,the SSTS delivers a high-performance output and high stability,thus enhancing the monitoring of hand pressure changes,human movement,personalized spatial recognition,and other detection tasks.This new strategy for human motion monitoring shows great potential in the healthcare fields,sports rehabilitation,and human-computer interactions. 展开更多
关键词 triboelectric nanogenerator spongy pressure sensor single-electrode high sensitivity wide measurement range
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A high-power and high-efficiency mini generator for scavenging energy from human foot movement
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作者 WU Hui QIAN Shuo +9 位作者 HOU XiaoJuan ZHAO JuanHong ZHANG Jie SONG XiaoGuang LIU YanLi SHI ShuZheng geng wenping MU JiLiang HE Jian CHOU XiuJian 《Science China(Technological Sciences)》 SCIE EI CAS CSCD 2023年第12期3381-3392,共12页
Harvesting energy from human movement and converting it into electricity is a promising method to address the issue of sustainable power supply for wearable electronic devices.Using traditional energy harvesters for p... Harvesting energy from human movement and converting it into electricity is a promising method to address the issue of sustainable power supply for wearable electronic devices.Using traditional energy harvesters for practical applications is difficult due to their low output power.In this paper,an energy harvester with high power and efficiency is reported based on the principle of electromagnetic induction.It adopts a tiny compound mechanism comprising symmetrical lever-sector gear,which can amplify the vertical displacement of the human heel of 1.44 times without affecting the flexibility and comfort of human movement.The lever-sector gear and gear acceleration mechanism can achieve high output power from the tiny vertical movements of the heel.The results demonstrated that the average power and energy harvesting efficiency of the device are 1 W and 63%,respectively.Moreover,combining a novel controllable electric switch and energy management circuit allows the energy harvester to be worn by individuals with different weights and functions as a continuous real-time power supply for various electronic devices(mobile phones,smartwatches,etc.).Therefore,this research provides a new approach for the highly efficient harvesting of human motion energy and sustainable power supply of wearable electronics. 展开更多
关键词 human movement energy lever-sector gear compound mechanism high power electromagnetic energy harvester wearable electronics
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A high-performance hybrid wind energy harvester based on a bidirectional acceleration structure
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作者 HU DongXu QIAN Shuo +9 位作者 HOU XiaoJuan DUAN ZhiGang NIU LiXin WU Hui LIU JianJun ZHANG Jie geng wenping MU JiLiang HE Jian CHOU XiuJian 《Science China(Technological Sciences)》 CSCD 2024年第12期3766-3776,共11页
Given the intensifying scarcity of non-renewable energy sources,wind power is garnering importance across various fields.However,the prevalent wind power generation technologies have different problems,such as small o... Given the intensifying scarcity of non-renewable energy sources,wind power is garnering importance across various fields.However,the prevalent wind power generation technologies have different problems,such as small output and low conversion efficiency.Hence,in this study,we propose a high-performance hybrid wind energy generator with a bidirectional acceleration structure.Based on a reversing gear,the magnet-coil rotor pair moves in a circular motion at equal speeds and in opposite directions,resulting in twice the output performance of a conventional generator and improving the conversion efficiency up to38.4%.The optimized wind turbine structure and the soft contact of the triboelectric material allow the generator to start functioning at low wind speeds of 3 m/s.Simultaneously,it can detect wind speeds ranging from 3 to 15 m/s with a linearity of up to 0.997.At a wind speed of 6 m/s,the generator's output power reaches 165.76 m W,which can transmit the data of the light sensor to a computer via Bluetooth for real-time display and also power small electronic devices such as thermo-hygrometers,which demonstrates a wide range of applications in the field of sustainable monitoring. 展开更多
关键词 wind energy harvesting bidirectional acceleration structure hybrid generator wind speed detection
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