Multi-photon three-dimensional(3D)nanoprinting technology,renowned for its 3D processing capability and nano-scale resolution beyond the diffraction limit,has garnered significant attention in the micro/nano-additive ...Multi-photon three-dimensional(3D)nanoprinting technology,renowned for its 3D processing capability and nano-scale resolution beyond the diffraction limit,has garnered significant attention in the micro/nano-additive manufacturing field.This technology finds widespread applications in optics,biology,and mechanical engineering research.However,its broader adoption in industrial production and applications has been hindered by limitations such as relatively slow processing speed and restricted material formability and functionality.This paper presents the latest advancements in multi-photon 3D nanoprinting,with a focus on analyzing optical methods to enhance the processing speed of scanning and projection techniques.Additionally,it examines issues related to the formability and functionality of commonly used photosensitive materials,including organic polymers,inorganic compounds,and composite materials.In conclusion,this paper offers a comprehensive summary from the perspectives of productivity,cost,materials,and cross-scale processing,along with proposed routes and future directions.展开更多
Nano-3D printing has obtained widespread attention owing to its capacity to manufacture end-use components with nano-scale features in recent years.Multiphoton lithography(MPL)is one of the most promising 3D nanomanuf...Nano-3D printing has obtained widespread attention owing to its capacity to manufacture end-use components with nano-scale features in recent years.Multiphoton lithography(MPL)is one of the most promising 3D nanomanufacturing technologies,which has been widely used in manufacturing micro-optics,photonic crystals,microfluidics,meta-surface,and mechanical metamaterials.Despite of tremendous potential of MPL in laboratorial and industrial applications,simultaneous achievement of high throughput,high accuracy,high design freedom,and a broad range of material structuring capabilities remains a long-pending challenge.To address the issue,we propose an acousto-optic scanning with spatial-switching multispots(AOSS)method.Inertia-free acousto-optic scanning and nonlinear swept techniques have been developed for achieving ultrahigh-speed and aberration-free scanning.Moreover,a spatial optical switch concept has been implemented to significantly boost the lithography throughput while maintaining high resolution and high design freedom.An eight-foci AOSS system has demonstrated a record-high 3D printing rate of 7.6×10^(7)voxel s^(-1),which is nearly one order of magnitude higher than earlier scanning MPL,exhibiting its promise for future scalable 3D nanomanufacturing.展开更多
基金financially supported by the National Key Research and Development Program of China(2021YFF0502700)the National Natural Science Foundation of China(52275429 and 62205117)+4 种基金the Innovation Project of Optics Valley Laboratory(OVL2021ZD002)the Young Elite Scientists Sponsorship Program by CAST(2022QNRC001)the West Light Foundation of the Chinese Academy of Sciences(xbzg-zdsys-202206)the Knowledge Innovation Program of Wuhan-Shuguangthe Hubei Provincial Natu-ral Science Foundation of China(2022CFB792).
文摘Multi-photon three-dimensional(3D)nanoprinting technology,renowned for its 3D processing capability and nano-scale resolution beyond the diffraction limit,has garnered significant attention in the micro/nano-additive manufacturing field.This technology finds widespread applications in optics,biology,and mechanical engineering research.However,its broader adoption in industrial production and applications has been hindered by limitations such as relatively slow processing speed and restricted material formability and functionality.This paper presents the latest advancements in multi-photon 3D nanoprinting,with a focus on analyzing optical methods to enhance the processing speed of scanning and projection techniques.Additionally,it examines issues related to the formability and functionality of commonly used photosensitive materials,including organic polymers,inorganic compounds,and composite materials.In conclusion,this paper offers a comprehensive summary from the perspectives of productivity,cost,materials,and cross-scale processing,along with proposed routes and future directions.
基金National Key Research and Development Program of China(2021YFF0502700)National Natural Science Foundation of China(52275429,62205117)+4 种基金Innovation project of Optics Valley Laboratory(OVL2021ZD002)Hubei Provincial Natural Science Foundation of China(2022CFB792)Young Elite Scientists Sponsorship Program by CAST(2022QNRC001)West Light Foundation of the Chinese Academy of Sciences(xbzg-zdsys-202206)Knowledge Innovation Program of Wuhan-Shuguang。
文摘Nano-3D printing has obtained widespread attention owing to its capacity to manufacture end-use components with nano-scale features in recent years.Multiphoton lithography(MPL)is one of the most promising 3D nanomanufacturing technologies,which has been widely used in manufacturing micro-optics,photonic crystals,microfluidics,meta-surface,and mechanical metamaterials.Despite of tremendous potential of MPL in laboratorial and industrial applications,simultaneous achievement of high throughput,high accuracy,high design freedom,and a broad range of material structuring capabilities remains a long-pending challenge.To address the issue,we propose an acousto-optic scanning with spatial-switching multispots(AOSS)method.Inertia-free acousto-optic scanning and nonlinear swept techniques have been developed for achieving ultrahigh-speed and aberration-free scanning.Moreover,a spatial optical switch concept has been implemented to significantly boost the lithography throughput while maintaining high resolution and high design freedom.An eight-foci AOSS system has demonstrated a record-high 3D printing rate of 7.6×10^(7)voxel s^(-1),which is nearly one order of magnitude higher than earlier scanning MPL,exhibiting its promise for future scalable 3D nanomanufacturing.
