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Chemical Bond Formation in C-implanted SiO_2 Films Induced by High-energy Pb-ion Irradiation
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作者 A. Benyagoub M. Toulemonde f. levesque 《近代物理研究所和兰州重离子加速器实验室年报:英文版》 2004年第1期67-67,共1页
SiO2 films were firstly implanted at room temperature (RT) with 120 keV C-ions and then irradiated at RT with 950 MeV Pb ions. The C-ion implantation was performed at the 200 kV heavy ion implanter (IMP, Lanzhou) and ... SiO2 films were firstly implanted at room temperature (RT) with 120 keV C-ions and then irradiated at RT with 950 MeV Pb ions. The C-ion implantation was performed at the 200 kV heavy ion implanter (IMP, Lanzhou) and the selected implantation doses are 2.0×1017, 5.0×1017 and 8.6×1017 C/cm2. The Pb ion irradiation was carried out at the IRASME (CIRIL-GANIL, Caen) and the irradiation fluence was in the region from 5.0×1011 to 3.8×1012 Pb/cm2. The chemical bond formation in the samples was investigated by using a Spectrum GX IR spectroscopy. 展开更多
关键词 离子辐照 铅离子 化学键 二氧化硅膜 诱导 高能 SIO2薄膜 离子植入
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