Smart dust,which refers to miniaturized,multifunctional sensor motes,would open up data acquisition opportunities for Internet of Things(IoT)and Environmental protection applications.However,critical obstacles remain ...Smart dust,which refers to miniaturized,multifunctional sensor motes,would open up data acquisition opportunities for Internet of Things(IoT)and Environmental protection applications.However,critical obstacles remain challenging in the integration of high-density sensors,further miniaturization of device platforms,and reduction of cost.Here,we demonstrate the concept of smart digital dust to address these problems,the results of which combine the benefit of(i)maturity of complementary metal-oxide semiconductor(CMOS)processing approaches and(ii)unique form factors of emerging flex-ible electronics.As a prototype for smart digital dust,we present a millimeter-scale multifunctional optoelectronic sensor platform con-sisting of high-performance optoelectronic sensor cores and commer-cially available integrated-circuit components.The smart material-assisted optoelectronic sensing mechanism enables real-time,high-sensitivity hydrogen,temperature,and relative humidity(RH)sens-ing based on a single chip with ultralow power consumption.Such a microsystem presented here introduces a viable solution to the multi-functional sensing need of IoT and could serve as a building block for the rapidly evolving future framework of smart dust.展开更多
基金supported by the National Key Technologies R&D Program of China(2021YFE0191800)the National Natural Science Foundation of China(61975035,51961145108)+3 种基金Science and Technology Commission of Shanghai Municipality(21142200200,20501130700)E.S.acknowledged the support by Lingang Laboratory(Grant No.LG-QS-202202-02)the support by Shanghai Municipal Science and Technology Major Project(Grant No.2018SHZDZX01)ZJ Lab,and Shanghai Center for Brain Science and Brain-Inspired Technology,and the support by the young scientist project of MOE innovation platform,Zhangjiang Fudan International Innovation Center,Part of the experimental work was carried out in Fudan Nanofabrication Laboratory.
文摘Smart dust,which refers to miniaturized,multifunctional sensor motes,would open up data acquisition opportunities for Internet of Things(IoT)and Environmental protection applications.However,critical obstacles remain challenging in the integration of high-density sensors,further miniaturization of device platforms,and reduction of cost.Here,we demonstrate the concept of smart digital dust to address these problems,the results of which combine the benefit of(i)maturity of complementary metal-oxide semiconductor(CMOS)processing approaches and(ii)unique form factors of emerging flex-ible electronics.As a prototype for smart digital dust,we present a millimeter-scale multifunctional optoelectronic sensor platform con-sisting of high-performance optoelectronic sensor cores and commer-cially available integrated-circuit components.The smart material-assisted optoelectronic sensing mechanism enables real-time,high-sensitivity hydrogen,temperature,and relative humidity(RH)sens-ing based on a single chip with ultralow power consumption.Such a microsystem presented here introduces a viable solution to the multi-functional sensing need of IoT and could serve as a building block for the rapidly evolving future framework of smart dust.
