Achieving a reasonable homogeneity of the coating deposition rate within a low-pressure plasma process is a challenge, especially in large volume chambers. The local gas flow behavior is one key parameter in the coati...Achieving a reasonable homogeneity of the coating deposition rate within a low-pressure plasma process is a challenge, especially in large volume chambers. The local gas flow behavior is one key parameter in the coating deposition. Basically, with the exception of the product geometry and the electrode design, there are two main influences on the gas flow distribution inside a large volume chamber: 1) gas feed-in system and 2) gas exhaustion system. This work focuses on the gas exhaustion system with the aim to reduce its influence on the gas flow behavior inside a large plasma coater. In this sense, a solution with a perforated plate, named “Baffle-Plate”, is created. Thereby relevant construction parameters are identified and investigated to understand their influence in respect to the homogeneity of the gas exhaustion. Number of holes, hole diameter, distance of the Baffle-Plate to the top of the chamber, gas flow and chamber volume are evaluated parameters. Computational fluid dynamics (CFD) simulations are used as a tool to determine velocity and pressure distribution inside the PECVD-chamber and, consequently, to evaluate the layout parameters of the Baffle-Plate. Additionally, practical coating experiments with and without the Baffle-Plate installed are performed. The results show a correlation between the gas flow distribution and the homogeneity of the coating deposition rate. With these results construction guidelines have been formulated. Hence in future developments correct technical layouts of the Baffle-Plate can be applied, easily.展开更多
The local gas-flow behavior is almost unknown for low pressure plasma systems, except parallel plate reactors for semiconductor purposes. To overcome this lack of knowledge, this study starts with the influence invest...The local gas-flow behavior is almost unknown for low pressure plasma systems, except parallel plate reactors for semiconductor purposes. To overcome this lack of knowledge, this study starts with the influence investigation of the gas feed-in systems technical layout on the homogeneity of the gas supply for large volume plasma enhanced chemical vapor deposition (PECVD) chambers. Computational fluid dynamics (CFD) simulations are used as a tool to determine velocity and pressure distribution inside the gas feed-in pipe as well as in the PECVD-chamber itself. The parameters varied were: flow rate, pipe length, number of holes, hole diameter and aspect ratio of the pipe section. The calculated pressure values are compared with the experimentally measured ones to validate the simulation results. An excellent conformity of the calculated and measured pressures is observed. With the aim to evaluate the homogeneity of gas distribution through the pipe holes the nonuniformity coefficient (Φ) was created. The results show the influence of each layout parameter in the homogeneity of the gas distribution. Hence in future correct technical layouts of gas feed-in systems can easily be applied. With these results construction guidelines has been formulated.展开更多
The current work aims at evaluating a proposed method based on a computational tool developed using Object-Oriented Programming to identify the status of micro-structured surfaces. In this case, these are micro-struct...The current work aims at evaluating a proposed method based on a computational tool developed using Object-Oriented Programming to identify the status of micro-structured surfaces. In this case, these are micro-structured coatings with riblet microstructure developed by Fraunhofer Institute–IFAM, by building a graphical reproduction of the analyzed surface and calculating an expected laser reflection intensity acquired by a laser sensor device, the proposed method is assessed by using the simplest case: a flat surface, and an optimal case: an intact riblet surface. The results corroborate the calculations to be applied to further steps from more complex cases of degradation and to diverse riblets geometries. Based on Huygens-Fresnel and Fraunhofer diffraction theories, the calculations developed and demonstrated in this paper improved the nondestructive tests to support the status identification of the micro structured coatings, e.g. riblet structures based on shark skin used in shipping and aerospace industries. This work is assured required quality of the riblet coating identifying the number of structures and expected geometry using implemented calculations to foresee the laser reflection intensity acquired by a laser sensor device with 3 detectors, for instance, a riblet structure could be graphically reproduced, analyzed and completely identified based on the application of the theoretical optics applied on this work.展开更多
This research paper is about investigating the mechanisms of elastomeric friction at low velocities. To do so, different experimental setups were performed to analyze friction, adhesion and surface energy among others...This research paper is about investigating the mechanisms of elastomeric friction at low velocities. To do so, different experimental setups were performed to analyze friction, adhesion and surface energy among others. The tested materials were EPDM samples with variations in the carbon black content. It was found, that at least for low velocities, the real contact area has the main impact on the friction of elastomers. This contact area seems to be highly influenced by the hardness or other bulk properties of the elastomers, which are modified by the varying carbon black content.展开更多
文摘Achieving a reasonable homogeneity of the coating deposition rate within a low-pressure plasma process is a challenge, especially in large volume chambers. The local gas flow behavior is one key parameter in the coating deposition. Basically, with the exception of the product geometry and the electrode design, there are two main influences on the gas flow distribution inside a large volume chamber: 1) gas feed-in system and 2) gas exhaustion system. This work focuses on the gas exhaustion system with the aim to reduce its influence on the gas flow behavior inside a large plasma coater. In this sense, a solution with a perforated plate, named “Baffle-Plate”, is created. Thereby relevant construction parameters are identified and investigated to understand their influence in respect to the homogeneity of the gas exhaustion. Number of holes, hole diameter, distance of the Baffle-Plate to the top of the chamber, gas flow and chamber volume are evaluated parameters. Computational fluid dynamics (CFD) simulations are used as a tool to determine velocity and pressure distribution inside the PECVD-chamber and, consequently, to evaluate the layout parameters of the Baffle-Plate. Additionally, practical coating experiments with and without the Baffle-Plate installed are performed. The results show a correlation between the gas flow distribution and the homogeneity of the coating deposition rate. With these results construction guidelines have been formulated. Hence in future developments correct technical layouts of the Baffle-Plate can be applied, easily.
文摘The local gas-flow behavior is almost unknown for low pressure plasma systems, except parallel plate reactors for semiconductor purposes. To overcome this lack of knowledge, this study starts with the influence investigation of the gas feed-in systems technical layout on the homogeneity of the gas supply for large volume plasma enhanced chemical vapor deposition (PECVD) chambers. Computational fluid dynamics (CFD) simulations are used as a tool to determine velocity and pressure distribution inside the gas feed-in pipe as well as in the PECVD-chamber itself. The parameters varied were: flow rate, pipe length, number of holes, hole diameter and aspect ratio of the pipe section. The calculated pressure values are compared with the experimentally measured ones to validate the simulation results. An excellent conformity of the calculated and measured pressures is observed. With the aim to evaluate the homogeneity of gas distribution through the pipe holes the nonuniformity coefficient (Φ) was created. The results show the influence of each layout parameter in the homogeneity of the gas distribution. Hence in future correct technical layouts of gas feed-in systems can easily be applied. With these results construction guidelines has been formulated.
文摘The current work aims at evaluating a proposed method based on a computational tool developed using Object-Oriented Programming to identify the status of micro-structured surfaces. In this case, these are micro-structured coatings with riblet microstructure developed by Fraunhofer Institute–IFAM, by building a graphical reproduction of the analyzed surface and calculating an expected laser reflection intensity acquired by a laser sensor device, the proposed method is assessed by using the simplest case: a flat surface, and an optimal case: an intact riblet surface. The results corroborate the calculations to be applied to further steps from more complex cases of degradation and to diverse riblets geometries. Based on Huygens-Fresnel and Fraunhofer diffraction theories, the calculations developed and demonstrated in this paper improved the nondestructive tests to support the status identification of the micro structured coatings, e.g. riblet structures based on shark skin used in shipping and aerospace industries. This work is assured required quality of the riblet coating identifying the number of structures and expected geometry using implemented calculations to foresee the laser reflection intensity acquired by a laser sensor device with 3 detectors, for instance, a riblet structure could be graphically reproduced, analyzed and completely identified based on the application of the theoretical optics applied on this work.
文摘This research paper is about investigating the mechanisms of elastomeric friction at low velocities. To do so, different experimental setups were performed to analyze friction, adhesion and surface energy among others. The tested materials were EPDM samples with variations in the carbon black content. It was found, that at least for low velocities, the real contact area has the main impact on the friction of elastomers. This contact area seems to be highly influenced by the hardness or other bulk properties of the elastomers, which are modified by the varying carbon black content.
