Surface acoustic wave(SAW)sensors demonstrate significant potential in environmental monitoring due to their high sensitivity and fast response capabilities.However,conventional single-component gas-sensitive material...Surface acoustic wave(SAW)sensors demonstrate significant potential in environmental monitoring due to their high sensitivity and fast response capabilities.However,conventional single-component gas-sensitive materials struggle to achieve both wide detection ranges and rapid response simultaneously.This study developed a high-performance composite film through heterostructure engineering to enhance carbon dioxide(CO_(2))sensing performance.A bilayer composite gas-sensing functional layer was fabricated by sequentially depositing tin oxide(SnO_(2))and copper oxide(CuO)films on a lithium niobate(LiNbO₃)substrate via magnetron sputtering.Experimental results demonstrated that the SnO_(2)-CuO composite sensor exhibited a CO_(2)sensitivity of 11.35 mV/%,representing 4.3-fold and 10.3-fold improvements over pure CuO(2.65 mV/%)and SnO_(2)(1.10 mV/%),respectively.The detection range was extended to 0.1-4vol%,with response and recovery times reduced to 9.3 s and 28.9 s at room temperature(25℃).In addition,the SAW sensor demonstrated excellent repeatability,humidity interference resistance,high selectivity and long-term stability(5.7%signal attenuation over 30 days).Density functional theory(DFT)calculations revealed that the enhanced performance was attributed to heterointerface charge modulation,which increased the adsorption capacity for CO_(2)molecules.展开更多
基金supported by the National Key Research and Development Program(2024YFE0199800)the National Natural Science Foundation of China(No.12404543)+1 种基金China Postdoctoral Science Foundation National Key Research(2023M733687)Key Research Program of Frontier Sciences,Chinese Academy of Sciences,Grant No.ZDBS-LY-7023.
文摘Surface acoustic wave(SAW)sensors demonstrate significant potential in environmental monitoring due to their high sensitivity and fast response capabilities.However,conventional single-component gas-sensitive materials struggle to achieve both wide detection ranges and rapid response simultaneously.This study developed a high-performance composite film through heterostructure engineering to enhance carbon dioxide(CO_(2))sensing performance.A bilayer composite gas-sensing functional layer was fabricated by sequentially depositing tin oxide(SnO_(2))and copper oxide(CuO)films on a lithium niobate(LiNbO₃)substrate via magnetron sputtering.Experimental results demonstrated that the SnO_(2)-CuO composite sensor exhibited a CO_(2)sensitivity of 11.35 mV/%,representing 4.3-fold and 10.3-fold improvements over pure CuO(2.65 mV/%)and SnO_(2)(1.10 mV/%),respectively.The detection range was extended to 0.1-4vol%,with response and recovery times reduced to 9.3 s and 28.9 s at room temperature(25℃).In addition,the SAW sensor demonstrated excellent repeatability,humidity interference resistance,high selectivity and long-term stability(5.7%signal attenuation over 30 days).Density functional theory(DFT)calculations revealed that the enhanced performance was attributed to heterointerface charge modulation,which increased the adsorption capacity for CO_(2)molecules.
