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Piezoresistive detector for MEMS accelerometer displacement sensing
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作者 b.rajesh kumar D V R Koti Reddy 《Journal of Measurement Science and Instrumentation》 CAS 2012年第3期224-227,共4页
We have designed a piezoresistive detector to detect the displacement of an accelerometer.We have used a flexible contact force and impact time detector for sensing the acceleration in the time domain.The advantage of... We have designed a piezoresistive detector to detect the displacement of an accelerometer.We have used a flexible contact force and impact time detector for sensing the acceleration in the time domain.The advantage of using this mechanism is good linearity,compactness,scalability,and the potential to realize a higher precision accelerometer due to time-based measurement.The estimated mechanical and electrical parameters of beam detector are presented.We used COMSOL Multiphysics for designing the detector and Matlab for analysis. 展开更多
关键词 piezoresistive detector time-based accelerometer force detector
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