We present a comparison of different techniques for the analysis of the shift and tilt in optical interference fringes. Fringe center, Radon transform, and Gaussian approximation methods are used for fringe analysis. ...We present a comparison of different techniques for the analysis of the shift and tilt in optical interference fringes. Fringe center, Radon transform, and Gaussian approximation methods are used for fringe analysis. We have measured the tilt and shift between two relevant fringe pattems. The error in tilt measurement was about 2%, and the displacement of the order of few nanometers was measured by the fringe shift analysis. The comparison between the techniques is analyzed with respect to percentage error.展开更多
文摘We present a comparison of different techniques for the analysis of the shift and tilt in optical interference fringes. Fringe center, Radon transform, and Gaussian approximation methods are used for fringe analysis. We have measured the tilt and shift between two relevant fringe pattems. The error in tilt measurement was about 2%, and the displacement of the order of few nanometers was measured by the fringe shift analysis. The comparison between the techniques is analyzed with respect to percentage error.
