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Physical properties of sprayed antimony doped tin oxide thin films:The role of thickness 被引量:4
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作者 a.r.babar S.S.Shinde +3 位作者 A.V.Moholkar C.H.Bhosale J.H.Kim K.Y.Rajpure 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2011年第5期10-17,共8页
Transparent conducting antimony doped tin oxide (Sb:SnO2) thin films have been deposited onto pre- heated glass substrates using a spray pyrolysis technique by varying the quantity of spraying solution. The structu... Transparent conducting antimony doped tin oxide (Sb:SnO2) thin films have been deposited onto pre- heated glass substrates using a spray pyrolysis technique by varying the quantity of spraying solution. The structural, morphological, X-ray photoelectron spectroscopy, optical, photoluminescence and electrical properties of these films have been studied. It is found that the films are polycrystalline in nature with a tetragonal crystal structure having orientation along the (211) and (112) planes. Polyhedrons like grains appear in the FE-SEM images. The average grain size increases with increasing spraying quantity. The compositional analysis and electronic behaviour of Sb:SnO2 thin films were studied using X-ray photoelectron spectroscopy. The binding energy of Sn3ds/2 for all samples shows the Sn^4+ bonding state from SnO2. An intensive violet luminescence peak near 395 nm is observed at room temperature due to oxygen vacancies or donor levels formed by Sb^5+ ions. The film deposited with 20 cc solution shows 70 % transmittance at 550 nm leading to the highest figure of merit (2.11 × 10^-3 Ω^-1). The resistivity and carrier concentration vary over 1.22 × 10^-3 to 0.89 × 10^-3Ω cm and 5.19 ×10^20 to 8.52 × 10^20 cm^-3, respectively. 展开更多
关键词 SEMICONDUCTORS MICROSTRUCTURE optical properties electrical properties
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Structural and optoelectronic properties of sprayed Sb:SnO_2 thin films:Effects of substrate temperature and nozzle-to-substrate distance 被引量:2
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作者 a.r.babar S.S.Shinde +2 位作者 A.V.Moholkar C.H.Bhosale K.Y.Rajpure 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2011年第10期1-9,共9页
The influence of substrate temperature and nozzle-to-substrate distance(NSD) on the structural,morphological, optical and electrical properties of Sb:SnO_2 thin films prepared by chemical spray pyrolysis has been a... The influence of substrate temperature and nozzle-to-substrate distance(NSD) on the structural,morphological, optical and electrical properties of Sb:SnO_2 thin films prepared by chemical spray pyrolysis has been analyzed.The structural,morphological,optical and electrical properties were characterized by using XRD,SEM, UV-visible spectrophotometry and Hall effect measurement techniques.It was seen that the films are polycrystalline, having a tetragonal crystal structure with strong orientation along the(200) reflection.The pyramidal crystallites formed due to coalescence were observed from SEM images.The values of highest conductivity,optical transmittance and figure of merit of about 1449(Ω·cm)^(-1),70%and 5.2×10^(-3)□/Ω,respectively,were observed for a typical film deposited using optimal conditions(substrate temperature = 500℃and NSD = 30 cm). 展开更多
关键词 substrate temperature NSD STRUCTURAL optoelectronic properties
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