摘要
基于梯度掺杂功能薄膜材料在工业应用中的需要、通过金属掺杂对新材料改性研究的需要 ,用单束激光交替作用于两相异靶材 ,制备了Mg Ag组分比为 0 .
Based on the importance of gradient doping functional thin film to the industries,and the demand of improving the properties of kinds of new materials by doping,using one pulsed laser beam on two different targets alternately and getting the Mg/Ag doping thin film with the components proportion 0.9.
出处
《激光杂志》
CAS
CSCD
北大核心
2004年第2期68-69,共2页
Laser Journal
关键词
梯度掺杂功能薄膜
金属掺杂
Mg/Ag掺杂
单束激光交替沉积
gradient doping functional thin film
improving the properties by doping
single laser beam alternately deposition
