摘要
电容式压力传感器测量膜片的形变,决定了计算压力测量环节中电容值的数学模型.介绍了测量膜片形变方程的建立、推导并对压力测量膜片在不同载荷下的形变特性进行了分析和计算,克服了原有测量膜片形变规律的错误模式.
The mathematical model which is used to calculate the capacitance in the pressure-measurement links is determined by deformation of membrane for capactive pressure sensor. The establishment and derivation of characteristic equation for membrane deformation measurement are introduced in this paper. The characteristics of membrane under differentloads are also analyzed and calculated. The error mode for deformation calculation of membrane is corrected.
出处
《海军工程大学学报》
CAS
2003年第6期29-32,共4页
Journal of Naval University of Engineering
