摘要
在精密测量和传感技术领域中,激光回馈技术依靠独特的优势被广泛应用。为减小死程误差对系统的影响,提出基于激光回馈效应的测量方法,构建全程准共路测量系统,分析系统工作原理和光学结构,并对系统的稳定性、分辨率进行实验。实验结果表明,利用全程准共路方法能将系统分辨率提高至2 nm,在不同距离和时间的情况下拥有良好的稳定性,有效抑制环境变化带来的影响,死程误差补偿效果显著,可应用于精密加工机械的位移、振动等测量。
In the domain of precision measurement and sensing technology, laser feedback technology is widely used due to its unique advantages. In order to reduce the impact of deadpath error on the system, a measurement method based on laser feedback effect was proposed, and the full quasi-common-path measurement system was constructed. The working principle and optical structure of the system were analyzed, and the resolution and stability of the system were experimented. The experimental results show that the full quasi-common-path method can improve the system resolution to 2 nm, and it has good stability at different distances and times. It effectively diminishes the influence of environmental fluctuations and significantly compensates for deadpath errors, making it suitable for displacement and vibration measurements in precision machining equipment.
作者
钟浩男
吴鹏
Zhong Haonan;Wu Peng(School of Mechanical Engineering,Guizhou University,Guiyang 550025,Guizhou,China;State Key Laboratory of Public Big Data,Guizhou University,Guiyang 550025,Guizhou,China)
出处
《应用激光》
CSCD
北大核心
2024年第6期144-150,共7页
Applied Laser
基金
贵州省教育厅自然科学项目(黔教合KY字[2021]095)。
关键词
激光回馈
死程误差
全程准共路
误差补偿
laser feedback
deadpath error
full quasi-common-path
error compensation
