摘要
提出一种基于最小二乘迭代的多波长同时相移干涉测量方法。该方法可以在三个波长光波同时入射的同轴相移干涉测量系统中,对所有波长进行同时相移,通过单色CCD采集一系列相移量未知的多波长同时相移干涉条纹图,利用最小二乘迭代算法提取出单个波长下的包裹相位分布。结合多波长光学位相解包和降噪处理得到合成波长的相位分布,进而测量出待测物体的三维形貌。对该方法进行了数值模拟和光学实验验证,结果表明该方法实验过程简便、测量精度高、抗噪能力强。
A novel simultaneous phase-shifting multi-wavelength interferometry based on the least-square iterative algorithm is presented. From the in-line phase-shifting interferometry system of three illumination wavelengths, a phase-shifting procedure of all illumination wavelengths can be carried out simultaneously. A sequence of phasesshifting interferograms with unknown phase-shifts at multiple wavelengths have been recorded simultaneously by a monochrome CCD. By using the least-square iterative operation, the wrapped phase at each single wavelength can be retrieved respectively, so the phase of synthetic wavelength can be obtained by multi-wavelength optical phase unwrapping and noise reduction, and then the three-dimensional topography of the measured object is got. The proposed method has been validated by both the numerical simulation and optical experiment, which shows simple optical setup, high measuring accuracy and capacity of anti-noise.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2016年第3期211-220,共10页
Chinese Journal of Lasers
基金
国家自然科学基金(61078064
61177005
61275015
61475048)
关键词
测量
相干光学
干涉术
相位测量
相移技术
多波长相移干涉术
最小二乘迭代算法
measurement
coherence optics
interferometry
phase measurement
phase-shifting technique
multi-wavelength phase-shifting interferometry
least-squares iterative algorithm
