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纳米多孔WO_3薄膜的溶胶-凝胶制备与热处理 被引量:12

Preparation of Sol-gel Derived Nano Porous WO_3 Thin Films and Annealing Effect
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摘要 以金属W粉为无机原料 ,采用溶胶 -凝胶技术 ,结合浸渍镀膜方法 ,制备出纳米多孔WO3薄膜 ,研究了热处理对薄膜性能的影响 .采用原子力显微镜、红外光谱仪、可见光分光光度计、椭偏仪等仪器测量了薄膜的特性 .实验表明 :热处理使得薄膜致密 ,折射率增大 (从 1.77增加至 2 .0 3 ) ,厚度减小 ,WO3颗粒增大 ;WO3结构发生变化 ,桥键WOW吸收逐渐减弱 ,且向低波数方向移动 ,共角WOW键吸收越来越强 .这些变化归因于热处理导致的WO3颗粒形状、团聚状态的变化以及应力键的产生 . The preparation of nano porous tungsten oxide films has been reported using a sol-gel process with the starting tungsten powders together with the dip coating method.The effect of heat treatments on the films has investigated with ellipsometer fourier transform infrared spectroscopy(FTIR),spectrophotometer,atomic force microscopy (AFM) and profile,respectively.Thickness of the films decreases with the annealing temperature increasing,while refractive index of the films increases from 1.77 to 2.03;and WO 3 particles in the films grow,infrared spectroscopy revealed that the absorption of the corner-sharing mode in the films increases,whereas that of the bridging WOW bond diminishes and shifts to a lower wave number during the annealing.These are attributed to a change of WO 3 particle shape and state of aggregation of the particles in the films as well as the formation of strained WOW bonds during the annealing.
出处 《同济大学学报(自然科学版)》 EI CAS CSCD 北大核心 2002年第3期370-374,378,共6页 Journal of Tongji University:Natural Science
基金 国家自然科学基金资助项目 ( 699780 17 5 980 2 0 0 7) 同济大学理科基金资助项目
关键词 溶胶-凝胶技术 WO3薄膜 热处理 纳米多孔结构 氧化钨薄膜 致色性功能材料 sol-gel process tungsten oxide film annealing nano-porous structure
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参考文献1

  • 1Xin Min Du,Rui M. Almeida. Effects of Thermal Treatment on the Structure and Properties of SiO2-TiO2 Gel Films on Silicon Substrates[J] 1997,Journal of Sol - Gel Science and Technology(1-3):377~380

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