摘要
对所研究的 8种纳米多层膜 (Ti N/Nb N、Ti N/Ta N、Ti N/Ta WN、Ti N/Al N、Nb N/Ta N、Ti N/Si3N4 、W/Si C和 W/Mo)的晶体结构、调制结构、生长方式和界面结构类型以及它们的超硬度效应特征进行了总结和讨论 .结果认为 ,界面共格应变或其他原因所导致的交变应力场对薄膜造成的强化作用是纳米多层膜产生超硬效应的主要原因之一 .
The characteristics of crystalline, modulation structure, growth mode, interface structure and superhardness of 8 multilayer systems (TiN/NbN, TiN/TaN, TiN/TaWN, TiN/AlN, NbN/TaN, TiN/Si3N4, W/SiC and W/Mo) were summarized and discussed. The results show that one of the main reasons that multiplayer films are strengthened and having superhardness is the alternating stress field resulted from coherent strain of interface or other causes.
出处
《上海交通大学学报》
EI
CAS
CSCD
北大核心
2001年第3期457-461,共5页
Journal of Shanghai Jiaotong University
