摘要
介绍一种采用激光测量反射镜偏角的方法 ,它适合于光学系统装配时的测量。采用 CCD细分技术对成象光斑质心进行提取 ,提高了偏角测量精度 ,在 1 .2 5°的测量范围内 ,可以达到±
A method for measuring deflection angle of mirror with laser is introduced.It is suitable for the measurement in assembling of an optical system.The centroid of imaging spot is extracted with CCD subdivision technique,thus the measuring accuracy of the deflection angle can be improved.Within the measuring range of 1.25°,a measuring accuracy of ±3″ can be achieved.
出处
《光电工程》
CAS
CSCD
北大核心
2001年第1期36-38,共3页
Opto-Electronic Engineering
关键词
角度测量
激光测角
测量精度
光学系统
Angle measurement
Laser angle measurement
Mirror
Measuring accuracy
