摘要
综述了飞秒激光对硅表面微构造的研究进展。阐述了超短脉冲诱导硅材料表面深亚波长结构的形成机理,讨论了飞秒激光作用硅表面制备微纳结构的影响因素和该微纳结构的发光特性,介绍了飞秒激光诱导硅材料表面微纳复合结构的生物仿生特性。揭示了飞秒激光在微结构制备方面的广泛应用前景。
The research progress of femtosecond laser microstructuring silicon surfaces is summarized. The formation mechanism of the deep subwavelength structure of silicon surfaces induced by ultrashort pulse is introduced, the influence factors of the preparation of micro-nano structures with femtosecond laser irradiating silicon surfaces and the luminescence properties of the micro-nano structures are discussed. The biological bionic characteristics of the micro-nano structures of silicon surfaces induced by femtosecond laser are introduced. The widespread application prospects of femtosecond laser in the preparation of the microstructures are put forward.
出处
《激光与光电子学进展》
CSCD
北大核心
2013年第11期12-18,共7页
Laser & Optoelectronics Progress
基金
国家自然科学基金(11104160)
关键词
光学制造
飞秒激光
硅
脉冲
发光特性
optical fabrication femtosecond laser
silicon
pulse luminescence property
