摘要
位相测量轮廓术是三维面形测量的一种重要方法。它采用的离散相移技术要求精确的相移，在实际系统中不可避免地存在着相移误差，它将导致计算位相和重建面形的误差。本文利用已建立的三维面形仿真系统，定量研究了在不同线性相移误差下所引起的位相误差和面形误差大小。本文还讨论了应如何选取最佳的相移次数。本文的工作可为实际测量系统的校准提供理论数据，对实际测量工作具有指导意义。
Phase measurement profilometry is one of the important 3 D surface shape measuring methods.The applied discrete phase shift technique needs the precison phase shift.Phase shift error is inevitable existed in a practical measuring system and it must lead to the errors in phase calculating and reconstructing of surface shape.The sizes of the phase error and surface shape error caused by the different linear phase shift errors are quantitatively investigated by means of the constructed 3 D surface shape simulation system in the paper.The paper also discusses how to select the optimal phase shift frequency.The work described in the paper can provide theoretical data for the calibration of the practical measuring system and it has some guidance significance for the practical measurement.
出处
《光电工程》
CAS
CSCD
1999年第2期68-72,共5页
Opto-Electronic Engineering
关键词
面形测量
轮廓测量
三维测量
相位测量
相移
Surface shape measurement,Profile measurement,Three dimensional measurement,Phase measurement,Phase shift,Computer simulation.
