摘要
采用理论分析与数值模拟相结合的方法,研究了残余应力对静电反馈式MEMS高温剪应力传感器的结构设计的影响.研究表明:在电极宽度和间距不变的情况下,增加电极数和减小电极长度可有效地减小由静电力引起的应力和变形;残余应力对结构应力和变形的影响远大于静电力.
The effect of residual stress on the structural design of high temperature MEMS shear stress sensor is analyzed both theoretically and numerically.It is found that under the condition of constant electrode width and electrode gap,the increase of electrode number and the decrease of electrode length will effectively reduce the electrostatic-force induced stress and deformation.The residual stress originated from MEMS fabrication, however,shows much stronger influence on the stress and deformation than that of electrostatic force.Therefore, the residual stress must be seriously considered for the reliability of the structure.The analytical results can be a reference for the structural design of this innovative high temperature MEMS shear stress sensor.
出处
《力学与实践》
CSCD
北大核心
2010年第1期60-63,共4页
Mechanics in Engineering
基金
总装备部预研基金项目
国家自然科学基金资助(10502049)
