摘要
根据压电效应理论设计出压电式驱动器。驱动器中悬臂梁的宽度、长度以及压电材料与非压电材料的厚度比例对驱动器的输出位移有很大影响。利用MEMS专业有限元分析软件Conventor Ware,对压电式驱动器的各项参数进行分析,并对结构进行优化。
According to the theoretical design of piezoelectric effect piezoelectric drive. Drive beam width, length and the piezoelectric material and non-piezoelectric material thickness ratio of the output of the drive have a great impact on displacement. The use of MEMS professional finite element analysis software conventor ware,piezoelectric drive of the parameters for analysis and optimization of the structure.
出处
《机械工程师》
2009年第11期66-67,共2页
Mechanical Engineer
