摘要
为得到空间光学元件超光滑表面,对超精密气囊抛光方法的去除特性进行了理论和实验研究。以Preston方程为基础,应用运动学原理建立了气囊抛光"进动"运动的材料去除模型,针对抛光气囊工具的物理特性,按照Hertz接触理论对去除模型进行了修正;利用计算机仿真的方法,分析了几个主要工艺参数对"进动"抛光运动去除特性的影响规律,并在超精密光学数控抛光机上进行了正交实验;仿真和实验结果吻合较好,总结得到4点气囊抛光方法中重要的结论,给出了"进动"角与压缩量的取值范围,以此得到了面型精度RMS值为0.024λ(λ=0.6328μm)的超光滑表面,为开展光学元件气囊抛光工艺研究提供依据。
Theoretical and experimental research on removing characteristics of ultraprecise bonnet polishing methods are made to get an ultra - smooth surface for optical elements. A material removing model of bonnet polishing processional motion is established according to kinematic principle based on Preston equation. The model is modified in terms of Hertz contact theory using the physical characteristics of polishing bonnet tools. The affect of several main technological parameters to removing characteristics of processional polishing motion is analyzed by means of computer simulation, and an orthogonal test is made on an ultraprecise numerical control polishing machine. The simulation results fit well with test results and four important conclusions on bonnet polishing technology are obtained. The span of processional angle and decrement is provided and an ultraprecise smooth surface with RMS = 0. 024 it figure precision is achieved, which provides theoretical foundation to research on bonnet polishing technology of optical elements.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2009年第3期811-817,共7页
Acta Optica Sinica
基金
国家863计划资助课题。
