摘要
用自制飞行时间质谱仪研究了微秒级脉冲辉光放电中样品离子与基底气体离子的形成过程．气体离子和样品离子的的产生存在着时间上的差异，气体主要通过与电子的碰撞而离子化，形成于脉冲放电期间；而样品原子必须先被溅射出来，再主要通过与能量较高的粒子（氩的亚稳态原子）的碰撞而被离子化，形成于脉冲放电终止以后．文中提出了微秒级脉冲辉光放电中离子的扩散及传输模型，并对结果进行了分析和讨论．
The ion production processes in microsecond pulse glow discharge are studied with a home made time of flight mass spectrometer. Gas species and sputtered materials are found to be ionized at different time regimes. Gas ions are produced during pulse on regime by electronic impact, however, sample atoms should first be sputtered off the sample and surface then be ionized by Penning ionization at tens of microseconds after the pulse off regime. An ion diffusion and transmission model in microsecond pulse glow discharge plasma is raised and discussed.
出处
《厦门大学学报（自然科学版）》
CAS
CSCD
北大核心
1998年第2期199-203,共5页
Journal of Xiamen University：Natural Science
基金
国家自然科学基金
厦门市政府专项基金
关键词
微秒级脉冲
辉光放电
飞行时间质谱
离子
Microsecond pulse, Glow discharge, Time of flight mass spectrometry, Plasma diagnosis
