期刊文献+

VDMOS器件贴片工艺中气泡的形成机制与影响 被引量:4

Formation and Effects of Void in VDMOS Die Attach Process
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摘要 功率MOS管的封装贴片工艺会在贴片层中引入气泡,从而严重降低器件的机械性能、热性能和电学性能。本研究就VDMOS管D-PAK封装模式,给出了贴片工艺中气泡的产生机制及其影响,并利用FEA方法建立了其D-PAK封装的热学模型。根据模拟结果,在贴片层中气泡含量提高时,热阻会急剧增大而降低器件的散热性能。 Die attach process for power MOSFET package will induce voids in the solder layer, it will greatly degrade the mechanical, thermal and electrical performance of device. The formation reasons in die attach process based on the D-PAK for VDMOS were presented. A thermal impedance model was proposed through the FEA (finite element analysis) method, our simulation results show that voids in the solder layer have a detrimental effect on heat flow and increase the thermal impedance of the packaged device.
出处 《半导体技术》 CAS CSCD 北大核心 2007年第5期436-439,共4页 Semiconductor Technology
基金 国家自然科学基金项目(90607019)
关键词 横向双扩散金属氧化物 贴片工艺 有限元分析法 热阻 VDMOS die attach FEA thermal impedance
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参考文献8

  • 1Voltage regulator module (VRM) 10.2L design guidelines[K].Intel Corp,2005.
  • 2LIDOW A,KINZER D,SHERIDAN G,et al.The semiconductor roadmap for power management in the new millennium[J].Proceedings of the IEEE,2001,89(6):803-812.
  • 3SHAMAS N Y A.Present problems of power module packaging technology[J].Microelectronics Reliability,2003,43 (4):519-527.
  • 4TIZIANI R,PASSONI G,SANTOSPIRITO G.Adhesive die attach for power application:performance and reliability in plastic package[J].Microelectronics Reliability,2002,42 (9):1611-1616.
  • 5CHONG C T,LESLIE A,BENG L T.Investigation on the effect of copper leadfram oxidation on package delamination[C]//Electronics Components and Technology Conference.USA:LasVegas,1995:463-469.
  • 6Raumtaner.Microelectronics package handbook[M].New York:Van Nostrand Reinhold,1988:33-43.
  • 7KATSIS D C,VAN WYK J D.Void-induced thermal impedance in power semiconductor modules:some transient temperature effects[J].IEEE Trans on Industry Application,2003,39 (5):1239-1246.
  • 8AMMOUS A,SELLAMI F,AMMOUS K,et al.Developing an equivalent thermal model for discrete semiconductor packages[J].International Journal of Thermal Science,2003,42 (5):533-539.

同被引文献31

  • 1马泽涛,朱大庆,王晓军.一种高功率LED封装的热分析[J].半导体光电,2006,27(1):16-19. 被引量:39
  • 2万延树.塑料封装可靠性问题浅析[J].电子与封装,2007,7(1):8-13. 被引量:13
  • 3Arik M, Petroski J, Weaver S. Thermal Challenges in the Fu ture Generation Solid State Lighting Applications: Light Emit ring Diodes[C]//ASME/IEEE International Packaging Teeh nieal Conference, 2001 : 113-120.
  • 4Lidow A, Kinzer D, Sheridan G, et al. The Semiconductor Roadmap for Power Management in the New Millennium[C]// Proceedings of the IEEE,2001,89(6) :803-812.
  • 5Wakil J A,Ho P S. Simulating Package Behavior under Power Dissipation Using Uniform Thermal Loading[J]. IEEE Trans on Adv Packaging, 2001,24 ( 1 ):60-65.
  • 6Brown S B, Kim K H, Anand L, et al. An Internal Variable Constitutive Model for Hot Working of Metals[J].International Journal of Plasticity, 1989,5 :95-130.
  • 7TUMMALA R. Fundamentals of micro system packaging [M]. New York :McGraw-Hill,2001.
  • 8KATSIS D C, van WYK J D. Void-induced thermal impedance in power semiconductor modules: some transient temperature effects [J]. IEEE Trans on Industry Applications, 2003, 39 (5) : 1239-1246.
  • 9FLEISCHERA A S, CHANG L, JOHNSON B C. The effect of die attach voiding on the thermal resistance of chip level packages [J]. Microelectronics Reliability, 2006, 46 ( 5-6 ) : 794-804.
  • 10HE J, MORRIS W L, SHAW M C, et al. Reliability in large area die bonds and effects of thermal expansion mismatch and die size [J]. MAPS J, 1998,21 (3) :297-305.

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